Method of manufacturing an electro-mechanical energy conversion device for vibration driven actuator

A method of forming an electro-mechanical energy conversion element of a vibration wave driven actuator, the energy conversion element generating in a vibration member of the actuator a first vibration wave having a first direction, and a second vibration wave having a second direction which is different from the first direction, comprising the sequential steps of:

• forming at least a first green sheet and a second green sheet, said first green sheet including at least first and second through holes, said second green sheet including at least a first divided electrode and a second divided electrode;
• stacking said first green sheet and said second green sheet so that a first conductive material and a second conductive material on a surface of said first green sheet are electrically contacted through said first and second through holes, respectively, wherein said first conductive material is electrically contacted to said first divided electrode of said second green sheet and said second conductive material is electrically contacted to said second divided electrode of said second green sheet;
• and then
• simultaneously polarizing a first area of said first divided electrode and a second area of said second divided electrode using said first and second conductive materials, whereby said first area and said second area are polarized in different directions.

A method of forming an electro-mechanical energy conversion element of a vibration wave driven actuator, the energy conversion element generating a first vibration wave having a first direction and a second vibration wave having a second direction which is different from the first direction, comprising the sequential steps of:

• forming at least a first green sheet, a second green sheet, and a third green sheet, said first green sheet including at least first and second through holes, said second green sheet including at least a first divided electrode and a second divided electrode, and said third green sheet including at least a third divided electrode and a fourth divided electrode, wherein said first and second divided electrodes have the same phase as said third and fourth divided electrodes;
• stacking said first, second and third green sheets so that a first conductive material and a second conductive material on a surface of said first green sheet are electrically contacted through said first and second through holes, respectively, wherein said first conductive material is electrically contacted to said first and third divided electrodes, and said second conductive material is electrically contacted to said second and fourth divided electrodes;
• and then
• polarizing a first area of said first divided electrode, a second area of said second divided electrode, a third area of said third divided electrode and a fourth area of said fourth divided electrode using said first and second conductive materials, such that said first area and said second area are polarized in different directions, said third area and said fourth area are polarized in different directions, said first area and said third area simultaneously are polarized in one direction, and said second area and said fourth area simultaneously are polarized in a second direction.