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US 5,669,125 AGranted
Method of manufacturing an ink-jet recording head
AssigneeNEC Corporation
InventorYoshio Shida
Life of this patent
Estimating the term…
Abstract
An ink-jet recording head includes a piezoelectric element, an ink cavity which is formed in the piezoelectric element to have a hollow shape and is filled with an ink, electrodes to which a drive voltage from the piezoelectric element is applied, and a metal foil film coated on an inner surface of the ink cavity. When the drive voltage is applied to the electrodes, the ink cavity is compressed by a displacement of the piezoelectric element to inject the filled ink.
Claims6
A method of manufacturing an ink-jet recording head, comprising the steps of:
- forming a hole forming pattern consisting one of a resin and carbon,
- forming a metal foil film on a surface of said hole forming pattern;
- stacking and pressing a plurality of piezoelectric sheets having electrodes formed thereon to sandwich said hole forming pattern, thereby forming a multi-layer structure;
- and
- removing said hole forming pattern in a binder removal process and a sintering process for said multi-layer structure, thereby forming an ink cavity, which has said metal foil film formed on an inner surface thereof, in said multi-layer structure.
2 more elements
A method of manufacturing an ink-jet recording head, comprising the steps of:
- forming a hole forming pattern consisting of a photosensitive resin using photolithography;
- forming a metal-plating layer on a surface of said hole forming pattern;
- stacking and pressing a plurality of piezoelectric sheets having electrodes formed thereon to sandwich said hole forming pattern, thereby forming a multi-layer structure;
- performing a binder removal process for said multi-layer structure to remove the photosensitive resin constituting said hole forming pattern, thereby forming an ink cavity, having said metal-plating layer formed on an inner surface thereof, in said multi-layer structure;
- and
- performing a sintering process for said multi-layer structure in which said ink cavity is formed.
3 more elements
Dependencies are inferred from the claim text.