Scan type exposure apparatus

A scan type exposure apparatus, comprising:

• a driving device for moving a mask having an exposure pattern and a photosensitive substrate of rectangular shape in synchronism along a predetermined coordinate axis;
• and
• an exposure control device for, by a single operation of said driving device, performing exposure of said exposure pattern to a pattern exposure portion of an exposure area of said photosensitive substrate, exposure of a first peripheral portion of said exposure area substantially in parallel with said coordinate axis, and exposure of a second peripheral portion of said exposure area substantially orthogonal to said coordinate axis, wherein said first peripheral portion and said second peripheral portion are outside of said pattern exposure portion of said exposure area.

A method for exposing a photosensitive substrate in which exposure is performed by transmitting a plurality of light beams through a plurality of partial areas, respectively, of a mask having an exposure pattern, to corresponding portions of an exposure area of a photosensitive substrate, said method comprising:

• moving said mask and said photosensitive substrate in synchronism along a predetermined coordinate axis;
• and
• in the course of said moving, performing exposure to exposure pattern portions of said exposure area of said photosensitive substrate, exposure to a first peripheral portion of said exposure area that is substantially parallel to said coordinate axis, and exposure to a second peripheral portion of said exposure area that is substantially orthogonal to said coordinate axis.