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US 5,668,452 AGranted
Magnetic sensing robotics for automated semiconductor wafer processing systems
AssigneeVLSI Technology, Inc.
InventorsDanine Villarreal, Anthony Sayka
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AssigneeVLSI Technology, Inc.
InventorsDanine Villarreal, Anthony Sayka
Estimating the term…
A collision avoidance technique is provided in an automated semiconductor wafer processing system, wherein a magnet or magnetic strip is incorporated into each boat or carrier used to hold and transport the semiconductor wafers during the IC fabrication process. Additionally, a magnetic field sensing device is incorporated into the robotic arm of the system for sensing the presence of magnetic fields generated by the magnet(s) incorporated into the boats and/or carriers. Using this system, it is possible for the automated system controller to determine whether an imminent collision is about to occur by monitoring changes in the detected magnetic field. In this way, collisions between one boat/carrier and a second boat/carrier may be anticipated and avoided without relying upon physical contact between the two objects in order to detect collision.
An automated system for processing of semiconductor wafers through a plurality of wafer fabrication processing stations for manufacturing integrated circuits, the plurality of processing stations including a first and a second processing station, said system comprising:
An automated system for processing of semiconductor wafers through a plurality of wafer fabrication processing stations for manufacturing integrated circuits, said system comprising at least one portable housing device for holding and transporting a plurality of semiconductor wafers during processing of said wafers, wherein said at least one housing device includes at least one magnet hermetically sealed within a portion of said housing for avoiding imminent collisions between said housing device and another object.
An automated system for processing of semiconductor wafers through a plurality of wafer fabrication processing stations for manufacturing integrated circuits, said system comprising at least one portable a carrier for holding and transporting a plurality of semiconductor housing devices, each of said housing devices holding and transporting a plurality of semiconductor wafers during processing of said wafers, wherein said at least one carrier includes at least one magnet hermetically sealed within a portion of said carrier for avoiding imminent collisions between said carrier and another object.
A method for processing of semiconductor wafers through a plurality of wafer fabrication processing stations for manufacturing integrated circuits, said system including a robotic arm having a magnetic field monitoring device, a housing device for carrying and transporting a plurality of semiconductor wafers, and a controller for automatically controlling movements and positions of the robotic arm, said method comprising the steps of:
Dependencies are inferred from the claim text.