Scanning electron microscope and its analogous device

A scanning electron microscope comprising:

• an electron gun for generating an electron beam;
• an objective lens for converging the electron beam to a sample so as to allow emission of the electron beam on the sample;
• a means for deflecting the electron beam so as to allow the electron beam to scan the sample;
• a means for generating an electric field having a component in the direction of an optical axis of the electron beam so as to extract, through said objective lens, a secondary electron generated from the sample by irradiation of the electron beam;
• a detector for detecting the extracted secondary electron;
• a means for tilting the sample with respect to the electron beam;
• and
• a means for correcting a nonaxisymmetric property, due to the tilting of the sample, of an electric field applied to the electron beam to be emitted on the sample;
• wherein the nonaxisymmetric property correcting means includes a deflecting electrode means to which a variable voltage is applied for generating an electric field having a component in the direction perpendicular to the optical axis of the electron beam.

A scanning electron microscope comprising:

• an electron gun for generating an electron beam;
• an objective lens for converging the electron beam to a sample so as to allow emission of the electron beam on the sample;
• a deflector for deflecting the electron beam so as to allow the electron beam to scan the sample;
• a detector for detecting an information signal, peculiar to the sample, generated from the sample by irradiation of the electron beam;
• a means for tilting a sample stage mounting the sample;
• and
• a plurality of electrodes disposed under said objective lens;
• wherein voltages applied to a group of a plurality of said electrodes which are separated apart from the sample stage when the sample stage is tilted are set on a negative side as compared with voltages applied to a remaining group of said electrodes which move near the sample stage when the sample stage is tilted.