Apparatus for suppressing electrification of sample in charged beam irradiation apparatus

A method for neutralization of an ion beam radiated in a first direction, comprising the steps of:

• radiating electrons;
• allowing said electrons to pass through an area while prohibiting contaminant substance to pass therethrough;
• accelerating said radiated and passed electrons in a second direction transverse to said first direction of said ion beam;
• decelerating said accelerating electrons in said second direction, and capturing contaminant substance so as to substantially prevent contaminant substance which moves in said second direction toward said ion beam from impinging with said ion beam;
• and
• supplying said decelerating electrons to said ion beam so as to combine therewith and enable neutralization of said ion beam.

A method for neutralization of an ion beam, comprising the steps of:

• ionizing a source gas to form electrons and ions;
• accelerating said electrons of the formed electrons and ions;
• decelerating said accelerated electrons;
• and
• supplying only said decelerated electrons to the ion beam so as to enable neutralization of the ion beam.

An apparatus for enabling neutralization of ion beam, comprising:

• means for ionizing a gas source to form electrons and ions;
• means for accelerating said electrons of the formed electrons and ions;
• means for decelerating said accelerated electrons;
• and
• means for supplying only said decelerated electrons to the ion beam so as to enable neutralization of the ion beam.