Solar cell manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorYukiko Iwasaki
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Abstract
To efficiently mass-produce back reflectors which are inexpensive and have high reflectivity, the invention provides a manufacturing method for a solar cell comprising at least a metal layer having a texture structure and high reflectivity, a transparent layer, a semiconductor layer, and a transparent electrode which are formed on a substrate, wherein the metal layer consists of at least two layers formed as a first metal layer and a second metal layer. The method includes a step of, after forming the first metal layer, annealing the first metal layer before forming the second metal layer. The invention also provides a solar cell manufacturing apparatus having, upstream of a second metal layer forming chamber, a heating chamber in which the first metal layer can be annealed.
Claims14
A method of manufacturing a solar cell comprising at least a metal layer, a semiconductor layer and a transparent electrode, said metal layer being comprised of cohered metal and metal, the method comprising the steps of:
- (1) forming a first metal on a substrate;
- (2) annealing said first metal to form a plurality of spots of cohered metal, wherein the interval between each spot is not less than 0.5 .mu.m;
- and
- (3) forming a second metal on and/or around said cohered metal, said cohered metal and said second metal thereby forming said metal layer.
Dependencies are inferred from the claim text.