Ink jet head and a method of manufacturing thereof

An ink jet head applying pressure to ink liquid filled in the interior for discharging said ink liquid outwards from said interior, comprising:

• a nozzle plate including a nozzle orifice,
• a vessel including an ink flow path communicating with said nozzle orifice,
• a buckling structure body having a center portion located between said nozzle orifice and said ink flow path, a surface facing said nozzle orifice, a back face at a rear side of said surface, and opposing ends, said opposing ends supported to said vessel at said back face, and
• compression means applying a compressive stress inwards of said buckling structure body,
• wherein said buckling structure body is buckled by a compressive stress applied by said compression means to have said center portion deformed towards said nozzle orifice.

An ink jet head applying pressure to ink liquid filled in the interior for discharging said ink liquid outwards from said interior, comprising:

• a nozzle plate including a nozzle orifice,
• a substrate including an ink flow path communicating with said nozzle orifice,
• a buckling structure body having a center portion located between said nozzle orifice and said ink flow path and having opposing ends, said opposing ends supported to at least said substrate, and
• compression means for applying a compressive stress inward of said buckling structure body by heating,
• wherein said buckling structure body is buckled by a compressive stress applied by said compression means to have the center portion of said buckling structure body deformed towards said nozzle orifice,
• wherein a distance between said buckling structure body and said substrate is not more than 10 .mu.m,
• wherein a width of said ink flow path is not more than 1/3 a length of a buckling portion of said buckling structure body at the ink flow path located closest to said buckling structure body,
• wherein said substrate includes a material having a thermal conductivity of at least 70W.multidot.m.sup.-1 .multidot.K.sup.-1.

A method of manufacturing an ink jet head applying pressure to ink liquid filled in the interior for discharging said ink liquid outwards from said interior, comprising the steps of:

• preparing a substrate of a material having a thermal conductivity of at least 70W.multidot.m.sup.-1 .multidot.K.sup.-1.
• forming a buckling structure body with opposing ends so that the ends are supported to a main surface of said substrate, and a distance to the main surface of said substrate is not more than 10 .mu.m, and forming an ink flow path piercing said substrate, and having an opening facing a center portion of said buckling structure body, so that an opening diameter of said ink flow path is not more than 1/3 a length of a buckling portion of said buckling structure body at the ink flow path located closest to said buckling structure body,
• forming a nozzle plate including a nozzle orifice, and
• coupling said nozzle plate to said substrate so that said center portion of said buckling structure body is located between said nozzle orifice and said ink flow path.