Semiconductor acceleration sensor and its fabrication method

A semiconductor acceleration sensor comprising;

• a circuit substrate:
• a thick film circuit including at least a circuit conductor and an insulating layer disposed on said circuit substrate;
• a pedestal disposed on said circuit substrate;
• a flexible acceleration detecting beam mounted on said pedestal and deflecting in response to an acceleration acting on said beam;
• a sensor device disposed on said acceleration detecting beam for converting deflection of said acceleration detecting beam into an electrical signal;
• and
• a sensor conductor electrically connecting said sensor device to said thick film circuit, wherein said pedestal includes both of said circuit conductor and said insulating layer.

A method of fabricating a semiconductor acceleration sensor comprising:

• printing a thick film circuit including at least a circuit conductor and a glass insulating layer, simultaneously forming a pedestal made of the same materials as at least one of said circuit conductor and said glass insulating layer on a circuit substrate;
• securing to said glass insulating layer a flexible acceleration detecting beam including a sensor device for converting deflection of said flexible acceleration detecting beam into an electrical signal, said flexible acceleration detecting beam deflecting in response to acceleration acting on said beam;
• and
• electrically connecting said sensor device to said thick film circuit.