Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it

A method for measuring the width of a tip in an Atomic Force Microscope/Scanning Tunneling Microscope using a calibration standard wherein said calibration standard has at least one pair of different kinds of structures, the structures of each of said pair of different kinds of structures having substantially the same width, comprising the steps of:

• providing a tip,
• measuring the width, to provide a measured width b1, of a first kind of structure of said at least one pair of different kinds of structures,
• measuring the width, to provide a measured width b2, of a second kind of structure of the same pair,
• said steps of measuring comprise the step of profiling said first and second kinds of structures of said at least one pair with said tip, and
• calculating the width of said tip as a function of said measured widths b1 and b2.