Method for producing thin film solar cell

A method for fabricating a thin film solar cell including a thin semiconductor film serving as a power generating layer, said method including:

• preparing a heat resistant substrate including a plurality of through-holes at respective positions;
• forming an intermediate layer on the substrate so that the through-holes are covered with the intermediate layer, and forming thin semiconductor film on the intermediate layer;
• and
• etching the intermediate layer through the through-holes to separate the thin semiconductor film from the heat resistant substrate.

A method for fabricating a thin film solar cell including a thin semiconductor film serving as a power generating layer, the method including:

• preparing a heat resistant substrate including a plurality of through-holes at respective positions;
• successively forming an intermediate layer and a thin semiconductor film on the heat resistant substrate so that the through-holes of the heat resistant substrate are not covered by the intermediate layer and thin semiconductor film, said thin semiconductor film having a first surface in contact with the intermediate layer and a second surface opposite the first surface;
• and
• etching the intermediate layer through the through-holes penetrating the heat resistant substrate, the intermediate layer, and the thin semiconductor film to separate the thin semiconductor film from the heat resistant substrate.