Detecting agent
AssigneeJapan Pionics Co., Ltd.
InventorsTakashi Shimada, Masako Yamakawa, Youji Nawa
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Abstract
A detecting agent for hydride gases (arsine, phosphine, silane, diborane, selenium hydride etc.) which comprises at least one member selected from molybdic acid, a salt thereof, a molybdenum-containing acid (molybdophosphoric acid, etc.) and a salt thereof, and optionally a cupric salt each as a discoloring component being supported on an inorganic carrier (silica, alumina, silica-alumina, zirconia, etc.). The above detecting agent can detect the above hydride gases contained in the exhaust gas discharged from a semiconductor manufacturing process, with high accuracy, selectivity and sensitivity at a high discoloring rate without being influenced by other gases such as hydrogen gas.
Claims15
An agent for detecting a hydride gas which consists essentially of a discoloring component supported on an inorganic carrier, the discoloring component consisting essentially of (i) at least one member selected from the group consisting of a molybdenum-containing acid and a salt thereof and (ii) a cupric salt.
An agent for detecting a hydride gas comprising:
- (a) a discoloring component comprising (i) a molybdenum-containing acid or salt thereof selected from the group consisting of molybdic acid, molybdophosphoric acid, a sodium salt of molybdophosphoric acid, a potassium salt of molydophosphoric acid, an ammonium salt of molybdophosphoric acid, sodium molybdate, potassium molybdate and ammonium molybdate, and (ii) a cupric salt selected from the group consisting of cupric nitrate, cupric sulfate, cupric chloride, cupric bromide and cupric acetate, and
- (b) an inorganic carrier which supports said discoloring component, said inorganic carrier being selected from the group consisting of silica, alumina, silica-alumina and zirconia, wherein a ratio by weight of said molybdenum-containing acid or salt thereof, said cupric salt and said inorganic carrier is 1:00001 to 0.1:0.00001 to 0.05, expressed in terms of the weight of the inorganic carrier:metallic molybdenum in the discoloring component:metallic copper in the discoloring component.
Dependencies are inferred from the claim text.