System for controlling growth of a silicon crystal
AssigneeMEMC Electronic Materials, Inc.
InventorRobert H. Fuerhoff
Life of this patent
Estimating the term…
Abstract
System and method for determining the diameter of a silicon crystal being pulled from a silicon melt for controlling a silicon crystal growing apparatus. The melt has a surface with a meniscus which is visible as a bright ring adjacent the crystal. A camera generates an image pattern of a portion of the bright ring adjacent the crystal. Image processing circuitry detects a characteristic of the image pattern and defines an edge of the bright ring as a function of the detected characteristic. The image processing circuitry further defines a generally circular shape including the defined edge of the bright ring. The diameter of the crystal is then determined based on the diameter of the defined shape for use in controlling the crystal growing apparatus.
Claims18
A system for use in combination with an apparatus for growing a silicon crystal from a silicon melt, said system for determining a diameter of the silicon crystal being pulled from the silicon melt, said silicon melt having a surface with a meniscus which is visible as a bright area adjacent the silicon crystal, said system comprising:
- a camera for generating an image pattern of a portion of the bright area adjacent the silicon crystal;
- a detection circuit for detecting an optical characteristic of the image pattern;
- a defining circuit for defining edges in the image pattern as a function of the detected optical characteristic, said defined edges corresponding to an edge of the bright area, and for defining a curve corresponding to the shape of the meniscus, said defined curve representing a circle that fits the defined edges in the image pattern corresponding to the edge of the bright area;
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- a measurement circuit for determining a dimension of the defined curve and determining the diameter of the silicon crystal as a function of the determined dimension of the defined curve.
A system for use in combination with an apparatus for growing a silicon crystal from a silicon melt, said system for determining a diameter of the silicon crystal being pulled from the silicon melt, said silicon melt having a surface with a meniscus which is visible as a bright area adjacent the silicon crystal, said system comprising:
- a camera for generating an image pattern of a portion of the bright area adjacent the silicon crystal;
- a detection circuit for detecting an optical characteristic of the image pattern, said detection circuit including means for defining window regions of the image pattern adjacent the portion of the bright area wherein the optical characteristic of the image pattern is detected within the window regions for defining the edge of the bright area;
- a defining circuit for defining an edge of the bright area as a function of the detected optical characteristic and for defining a curve including the defined edge of the bright area, said defined curve corresponding to the shape of the meniscus;
- and
- a measurement circuit for determining a dimension of the defined curve and determining the diameter of the silicon crystal as a function of the determined dimension of the defined curve.
A system for use in combination with an apparatus for growing a silicon crystal from a silicon melt, said crystal growth apparatus providing for rotation of the silicon crystal at a reference rate, said system for determining a diameter of the silicon crystal being pulled from the silicon melt, said silicon melt having a surface with a meniscus which is visible as a bright area adjacent the silicon crystal, said system comprising:
- a camera for generating an image pattern of a portion of the bright area adjacent the silicon crystal;
- a detection circuit for detecting an optical characteristic of the image pattern;
- a defining circuit for defining an edge of the bright area as a function of the detected optical characteristic and for defining a curve including the defined edge of the bright area, said defined curve corresponding to the shape of the meniscus;
- a measurement circuit for determining a dimension of the defined curve and determining the diameter of the silicon crystal as a function of the determined dimension of the defined curve;
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- means for detecting periodic deviations in the determined dimension of the defined curve relative to the reference rate thereby indicating zero dislocation growth of the silicon crystal.
A system for use in combination with an apparatus for growing a silicon crystal from a silicon melt, said system for determining a diameter of the silicon crystal being pulled from the silicon melt, said silicon melt having a surface with a meniscus which is visible as a bright area adjacent the silicon crystal, said silicon crystal being pulled from the silicon melt along a longitudinal axis which is substantially perpendicular to the silicon melt surface, said system comprising:
- a camera for generating an image pattern of a portion of the bright area adjacent the silicon crystal, said camera having an optical axis which is at an acute angle with respect to the longitudinal axis;
- means for adjusting the image pattern so that the portion of the bright area adjacent the silicon crystal is generally arcuate thereby compensating for distortion of the image pattern caused by the camera angle;
- a detection circuit for detecting an optical characteristic of the image pattern;
- a defining circuit for defining an edge of the bright area as a function of the detected optical characteristic and for defining a curve including the defined edge of the bright area, said defined curve corresponding to the shape of the meniscus;
- and
- a measurement circuit for determining a dimension of the defined curve and determining the diameter of the silicon crystal as a function of the determined dimension of the defined curve.
A system for use in combination with an apparatus for growing a silicon crystal from a silicon melt, said crystal growing apparatus having a crucible containing the silicon melt from which the silicon crystal is pulled and providing for relative movement between the silicon crystal and the crucible, said system for determining a diameter of the silicon crystal being pulled from the silicon melt, said silicon melt having a surface with a meniscus which is visible as a bright area adjacent the silicon crystal, said system comprising:
- a camera for generating an image pattern of a portion of the bright area adjacent the silicon crystal;
- a detection circuit for detecting an optical characteristic of the image pattern;
- a defining circuit for defining an edge of the bright area as a function of the detected optical characteristic and for defining a curve including the defined edge of the bright area, said defined curve corresponding to the shade of the meniscus;
- and
- a measurement circuit for determining a dimension of the defined curve and determining the diameter of the silicon crystal as a function of the determined dimension of the defined curve;
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- a control circuit responsive to the determined diameter of the silicon crystal for controlling the rates at which the crucible and/or the silicon crystal are rotated and/or for controlling the rate at which the silicon crystal is pulled from the silicon melt and/or for controlling the temperature of the silicon melt thereby to control the crystal growing apparatus.
A system for growing a silicon crystal from a silicon melt, said system comprising:
- an apparatus for pulling the silicon crystal from the silicon melt, said silicon melt having a surface with a meniscus which is visible as a bright area adjacent the silicon crystal as the silicon crystal is pulled from the silicon melt;
- a camera for generating an image pattern of a portion of the bright area adjacent the silicon crystal;
- a detection circuit for detecting an optical characteristic of the image pattern;
- a defining circuit for defining edges in the image pattern as a function of the detected optical characteristic, said defined edges corresponding to an edge of the bright area, and for defining a curve corresponding to the shape of the meniscus, said defined curve representing a circle that fits the defined edges in the image pattern corresponding to the edge of the bright area;
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- a measurement circuit for determining a dimension of the defined curve, wherein said apparatus is responsive to the measurement circuit for growing the silicon crystal from the silicon melt as a function of the determined dimension of the defined curve.
A system for use in combination with an apparatus for growing a silicon crystal from a silicon melt, said system for determining a diameter of the silicon crystal being pulled from the silicon melt, said silicon melt having a surface with a meniscus which is visible as a bright area adjacent the silicon crystal, said silicon crystal being generally cylindrical and said bright area being generally ring-shaped, said system comprising:
- a camera for generating an image pattern of a portion of the bright area adjacent the silicon crystal;
- a detection circuit for detecting an optical characteristic of the image pattern, said detection circuit including means for defining window regions of the image pattern adjacent the portion of the bright area wherein the optical characteristic of the image pattern is detected within the window regions for defining the edge of the bright area;
- a defining circuit for defining an edge of the bright area as a function of the detected optical characteristic and for defining a curve including the defined edge of the bright area, said defined curve corresponding to the shape of the meniscus, said defined curve being an ellipse and including the edge of the ring-shaped bright area defined within at least three of the window regions of the image pattern;
- and
- a measurement circuit for determining a dimension of the defined curve and determining the diameter of the silicon crystal as a function of the determined dimension of the defined curve.
Dependencies are inferred from the claim text.