US 5,664,926 A · Stage assembly for a substrate processing system

Abstract

A stage assembly for a substrate processing system including a cassette support assembly for receiving and supporting a cassette and an actuation and support assembly for supporting and moving the cassette and cassette support assembly between a loading position and a processing position. The processing position provides convenient and efficient access by a central processing system, and the loading position preferably places each cassette closer to, and aligned with, a front panel of the processing system for convenient access by an operator. The actuator and support assembly preferably includes a frame assembly and a rotating plate pivotally mounted to the frame assembly, where the cassette support assembly is mounted to the rotating plate for pivoting relative to the frame assembly. An actuator assembly mounted to the frame assembly flits the cassette support assembly between the loading and processing positions. A shaft assembly pivotally mounts the cassette support assembly to the rotating plate. An adjustable linkage assembly is mounted between the frame assembly and the shaft assembly, so that the cassette support assembly is rotated or swiveled by an adjustable amount between the loading and processing positions.

Claims20

Dependent claims

A stage assembly for a substrate processing system which processes at least one substrate inserted within a cassette, comprising:

a cassette support assembly for receiving and supporting a cassette;
and
an actuation and support assembly for supporting and moving said cassette support assembly between a loading position for loading and unloading cassettes and a processing position to enable access of substrates within the cassette by a processing system, said actuation and support assembly comprising:
a frame assembly;
a rotating plate pivotally mounted to said frame assembly and mounted to said cassette support assembly for rotating said cassette support assembly relative to said frame assembly;
a motor bracket pivotally mounted to said frame assembly;
an actuator motor mounted to said motor bracket;
a connecting rod pivotally mounted to said rotating plate and interfacing said actuator motor, wherein said actuator motor applies thrust force to said connecting rod for tilting said cassette support assembly between said loading and processing positions;
a crank arm mounted to said rotating plate;
and
a clamp mounted to said connecting rod and pivotally mounted to said crank arm.

8 more elements

A substrate processing system for processing substrates within a plurality of cassettes, comprising:

a station frame;
a processing system mounted to said station frame;
a front panel located on one end of said station frame;
and
a plurality of stages mounted to said station frame, each comprising:
a cassette support assembly that receives and supports a corresponding cassette;
and
an actuation and support assembly that supports said cassette support assembly and that translates said cassette support assembly between a corresponding one of a plurality of loading positions for loading and unloading said corresponding cassette and a corresponding one of a plurality of processing positions to enable access of the substrates from said corresponding cassette by said processing system, and during translation, said actuation and support assembly rotates said cassette support assembly relative to a first axis and tilts said cassette support assembly relative to a second axis, orthogonal to said first axis;
wherein said actuation and support assembly of each of said plurality of stages aligns a corresponding cassette support assembly in parallel with said front panel when in a corresponding one of said plurality of loading positions.

6 more elements

Dependencies are inferred from the claim text.

Stage assembly for a substrate processing system

Life of this patent

Stage assembly for a substrate processing system

Life of this patent

Abstract

Claims20