Process and arrangement for determining reference positions for planar hybrid stepper motors

A process for determining reference positions for planar hybrid stepper motors having a stator which is provided with a structure of orthogonally extending grooves and a movable part which has coils and is supported on the stator in air bearings, comprising the steps of:

• setting the movable part down on the stator and switching on an air supply for the air bearings;
• bringing the movable part into an alignment position in a working connection with displacement-free electrical contacts;
• turning off the air supply for the air bearings, thereby fixing the movable part in said alignment position;
• and
• supplying the coils of the movable part with current in sequence and switching on the air supply to the air bearings so that the movable part is brought from the alignment position into a reference position which is aligned with respect to the stator structure.

A process for determining reference positions for planar hybrid stepper motors having a stator which is provided with a structure of orthogonally extending grooves and a movable part which has coils and is supported on the stator in air bearings, comprising the steps of:

• setting the movable part down on the stator and switching on an air supply for the air bearings;
• bringing the movable part into an alignment position in a working connection with switching devices manually;
• turning off the air supply for the air bearings, thereby fixing the movable part in said alignment position;
• and
• supplying the coils of the movable part with current in sequence and switching on the air supply to the air bearings so that the movable part is brought from the alignment position into a reference position which is aligned with respect to the stator structure.

A process for determining reference positions for planar hybrid stepper motors having a stator which is provided with a structure of orthogonally extending grooves and a movable part which has coils and is supported on the stator in air bearings, comprising the steps of:

• setting the movable part down on the stator and switching on an air supply for the air bearings;
• bringing the movable part into an alignment position in a working connection by mechanical or electrical auxiliary means;
• turning off the air supply for the air bearings, thereby fixing the movable part in said alignment position;
• and
• supplying the coils of the movable part with current in sequence and switching on the air supply to the air bearings so that the movable part is brought from the alignment position into a reference position which is aligned with respect to the stator structure.