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US 5,663,884 AGranted
Multiprocessing apparatus
AssigneeHitachi, Ltd.
InventorsKouji Nishihata, Naoyuki Tamura, Shigekazu Kato, Atsushi Itou, Tsunehiko Tsubone
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AssigneeHitachi, Ltd.
InventorsKouji Nishihata, Naoyuki Tamura, Shigekazu Kato, Atsushi Itou, Tsunehiko Tsubone
Estimating the term…
A multiprocessing apparatus has a plurality of process processors connected to a carrier processor and controlled by a control system, wherein the apparatus includes connection information signal generating means for generating a connection information signal expressing information of connection of the plurality of process processors to the carrier processor, switching means for generating a registration information signal expressing information of registration of connection of the plurality of process processors to the carrier processor, and control means for carrying out a control process while logically judging a matching state between the connected process processors and the registered process processors by reference to the connection information and the registration information. Thus, it is possible to provide a multiprocessing apparatus in which process processors to be connected to the carrier processor can be increased or decreased in number easily and securely.
A method of controlling a wafer vacuum processing apparatus, said method comprising the steps of recognizing at least the following states:
A method of controlling a wafer vacuum processing apparatus, said method comprising the steps of recognizing at least the following states:
Dependencies are inferred from the claim text.