Schottky barrier MOSFET systems and fabrication thereof

An inverting single Metal Oxide Semiconductor (MOS) device with operating characteristics similar to multiple device Complimentary Metal Oxide Semiconductor (CMOS) systems in which an applied gate voltage controls a voltage present at an essentially electrically isolated terminal thereof;

• comprising first and second essentially non-rectifying channel region junctions in a surface region of a single doping type semiconductor selected from the group consisting of N-type, P-type, Intrinsic, N-type and Intrinsic, P-type and Intrinsic, N-type on insulator, and P-type on insulator, said first and second essentially non-rectifying channel region junctions being separated by first and second semiconductor channel regions from electrically interconnected rectifying Schottky barrier to channel region junctions, wherein first and second gates to which semiconductor channel region doping type effecting modulating gate voltage can be applied are associated with said first and second semiconductor channel regions, said first and second gates being offset from said first and second semiconductor channel regions respectively by insulating material, such that application of a sufficient negative voltage to the first and second gates will attract holes into said first and second semiconductor channel regions, and such that application of a sufficient positive voltage to the first and second gates will attract electrons into said first and second semiconductor channel regions, the purpose of applying such gate voltage being to modulate the effective doping type of said first and second semiconductor channel regions, such that when a constant polarity voltage is applied between said first and second essentially non-rectifying channel region junctions one rectifying Schottky barrier to channel region junction forward conducts while the other simultaneously does not, which Schottky barrier to channel region junction forward conducts at a specific time being determined by semiconductor doping type in said first and second semiconductor channel regions, said semiconductor doping type being determined by applied gate voltage polarity, which essentially electrically isolated terminal electrically contacts, via a junction thereto, said electrically interconnected rectifying Schottky barrier to channel region junctions between said first and second semiconductor channel regions and during use monitors a constant polarity voltage applied to one of the first and second essentially non-rectifying channel region junctions, which constant polarity voltage appears at said essentially electrically isolated terminal essentially through the forward conducting Schottky barrier to channel region junction, which constant polarity voltage monitored by said essentially electrically isolated terminal decreases when the gate voltage applied to said first and second gates is increased;
• the basis of operation being that said Schottky barrier junctions are formed between said first and second semiconductor channel regions and a material which provides a rectifying junction to a semiconductor channel region when it is doped either N or P-type.

A method of configuring a non-inverting Metal Oxide Semiconductor (MOS) device with operating characteristics similar to Complimentary Metal Oxide Semiconductor (CMOS) systems comprising the steps of:

• a. providing two Metal Oxide Semiconductor Field Effect Transistor (MOSFET) devices, each formed in a surface region of the same single doping type semiconductor selected from the group consisting of N-type, P-type, Intrinsic, N-type and Intrinsic, and P-type and Intrinsic, N-type on-Insulator, and P-type on Insulator, one said (MOSFET) device comprising two junctions, termed source and drain, separated by a first semiconductor channel region, and the second (MOSFET) device comprising two junctions, termed source and drain, separated by a second semiconductor channel region, wherein gates to which semiconductor channel region inverting voltages can be applied are associated with each of the first and second semiconductor channel regions are offset from said first and second semiconductor channel regions by insulating material, such that during use application a sufficient positive voltage to said gates will attract electrons to said first and second semiconductor channel regions, and such that application of sufficient negative voltage to said gates will cause attraction of holes to both of said first and second semiconductor channel regions, the purpose of applying such gate voltage being to, modulate the doping type of said first and second semiconductor channel regions between respective source and drain junctions, which drain junctions are each essentially non-rectifying, and which source junctions are rectifying Schottky barrier junctions, said Schottky barrier junctions each comprising a semiconductor and nonsemiconductor component;
• b. electrically interconnecting the essentially non-rectifying drain junction associated with said first semiconductor channel region, and the essentially non-rectifying drain junction associated with said second semiconductor channel region;
• c. electrically interconnecting said gates, such that during operation nonsemiconductor components of electrically noninterconncted rectifying Schottky barrier source junctions are held at different voltages, and application of a gate voltage controls effective semiconductor channel region doping type in both (MOSFET) devices, and thus which electrically noninterconnected rectifying Schottky barrier source junction forward conducts and which does not forward conduct, thereby controlling the voltage present at the electrically interconnected essentially non-rectifying drain junctions essentially through said forward conducting rectifying Schottky barrier junction;
• the basis of operation being that said Schottky barrier junctions are formed between said first and second semiconductor channel regions and a material which provides a rectifying junction to a semiconductor channel region when it is doped either N or P-type.

A method of configuring an inverting Metal Oxide Semiconductor (MOS) device with operating characteristics similar to Complimentary Metal Oxide Semiconductor (CMOS) systems comprising the steps of:

• a. providing two Metal Oxide Semiconductor Field Effect Transistor (MOSFET) devices, each formed in a surface region of the same single doping type semiconductor selected from the group consisting of N-type, P-type, Intrinsic, N-type and Intrinsic, P-type and Intrinsic, N-type on Insulator, and P-type on Insulator, one said (MOSFET) device comprising two junctions, termed source and drain, separated by a first semiconductor channel region, and the second (MOSFET) device comprising two junctions, termed source and drain, separated by a second semiconductor channel region, wherein gates to which semiconductor channel region inverting voltage can be applied are associated with each of the first and second semiconductor channel regions are offset from said first and second semiconductor channel regions by insulating material, such that during use application a sufficient positive voltage to said gates will attract electrons to said first and second semiconductor channel regions, and such that application of sufficient negative voltage to said gates will cause attraction of holes to both of said first and second semiconductor channel regions, the purpose of applying such gate voltage being to, modulate the effective doping type of said first and second semiconductor channel regions between respective source and drain junctions, which source junctions are each essentially non-rectifying, and which drain junctions are rectifying Schottky barrier junctions, said rectifying Schottky barrier junctions each comprising a semiconductor and nonsemiconductor component;
• b. electrically interconnecting a nonsemiconductor component of the rectifying Schottky barrier drain junction associated with said first semiconductor channel region, and a nonsemiconductor component of the rectifying Schottky barrier drain junction associated with said second semiconductor channel region;
• c. electrically interconnecting said gates, such that during operation electrically noninterconncted essentially non-rectifying source junctions are held at different voltages, and application of a gate voltage controls effective semiconductor channel region doping type in both (MOSFET) devices, and thus which electrically interconnected rectifying Schottky barrier drain junction forward conducts and which does not forward conduct, thereby controlling the voltage present at the nonsemiconductor components of the electrically interconnected Schottky barrier drain junctions essentially through said forward conducting rectifying semiconductor Schottky barrier junction;
• the basis of operation being that said Schottky barrier junctions are formed between said first and second semiconductor channel regions and a material which provides a rectifying junction to a semiconductor channel region when it is doped either N or P-type.

A Metal Oxide Semiconductor Field Effect Transistor (MOSFET) device system formed in a surface region of a semiconductor, comprising two N-type semiconductor Schottky barrier junctions, termed source and drain, separated by a first semiconductor channel region, in functional combination with two P-type semiconductor Schottky barrier junctions, termed source and drain, separated-by a second semiconductor channel region, each Schottky barrier junction comprising a semiconductor and nonsemiconductor component, said functional combination comprising an electrical interconnection between a nonsemiconductor component of one N-type semiconductor Schottky barrier junction and a nonsemiconductor component of one P-type semiconductor Schottky barrier junction, wherein gates to which channel region doping type and conductivity modulating voltages can be applied are associated with each of the first and second semiconductor channel regions, said gates being offset from said first and second semiconductor channel regions by insulating material, such that during operation application of a sufficient negative voltage to the gates atop the N and P-type semiconductors will cause formation of an inversion P-type channel in said N-type semiconductor channel region, and such that application of a sufficient positive voltage to the gates atop the P and N-type semiconductor will cause formation of an inversion N-type channel in said P-type semiconductor channel region, the purpose of applying such gate voltages being to modulate the effective doping type, conductivity and current carrying capability of the channel regions separating respective source and drain Schottky barrier junctions, and of tunneling and leakage current through said Schottky barrier junctions;

• in which MOSFET device system at least one of said source and drain Schottky barrier junctions is formed in a region etched into said semiconductor, which etched region is partially comprised of an insulating material, the purpose thereof being to reduce leakage current at said source or drain by limiting the area of Schottky barrier junctions in contact with said semiconductor to regions at ends of the associated semiconductor channel region.

A P-channel Metal oxide Semiconductor Field Effect Transistor (MOSFET) device system formed in a surface region of N-type semiconductor comprising two N-type semiconductor Schottky barrier junctions, termed source and drain, separated by a first semiconductor channel region, in functional combination with two N-type semiconductor Schottky barrier junctions, termed source and drain, separated by a second semiconductor channel region, said Schottky barrier junctions each comprising a semiconductor and nonsemiconductor component, said functional combination comprising an electrical interconnection between a nonsemiconductor component of one N-type semiconductor Schottky barrier junction associated with said first semiconductor channel region, and a nonsemiconductor component of an N-type semiconductor Schottky barrier junction associated with said second semiconductor channel region, wherein gates to which semiconductor channel region doping type inverting voltage can be applied are associated with each of said first and second semiconductor channel regions and offset from said first and second semiconductor channel regions by insulating material, such that during use application a sufficient negative voltage to said gates will cause both of said first and second semiconductor channel regions to invert, the purpose of applying such gate voltages being to modulate the type, conductivity and current carrying capability through said semiconductor channel regions between respective source and drain N-type semiconductor Schottky barrier junctions and of tunneling and leakage current through said Schottky barrier junctions;

• in which MOSFET device system at least one of said Schottky barrier source and drain junctions is formed in a region etched into said semiconductor, which etched region is partially comprised of insulating material, the purpose thereof being to reduce leakage current at said source or drain by limiting the area of Schottky barrier junctions in contact with said semiconductor to regions at ends of the associated semiconductor channel region.

An N-channel Metal Oxide Semiconductor Semiconductor Field Effect Transistor (MOSFET) device system formed in a surface region of a P-type semiconductor comprising two P-type semiconductor Schottky barrier junctions, termed source and drain, separated by a first semiconductor channel region, in functional combination with two P-type semiconductor Schottky barrier junctions, termed source and drain, separated by a second semiconductor channel region, said Schottky barrier junctions each comprising a Semiconductor and nonsemiconductor component, said functional combination comprising an electrical interconnection between a nonsemiconductor component of one P-type semiconductor Schottky barrier junction associated with said first semiconductor channel region, and a nonsemiconductor component of a P-type semiconductor Schottky barrier junction associated with said second semiconductor channel region, wherein gates to which semiconductor channel region doping type inverting voltages can be applied are associated with each of the first and second semiconductor channel regions and offset from said first and second semiconductor channel regions by insulating material, such that during use application a sufficient positive voltage to said gates will cause both of said first and second semiconductor channel regions to invert, the purpose of applying such gate voltages being to modulate the type, conductivity and current carrying capability through said semiconductor channel regions between respective source and drain Schottky barrier P-type semiconductor junctions and of tunneling and leakage current through the Schottky barrier junctions;

• in which MOSFET device system at least one of said source and drain Schottky barrier junctions is formed in a region etched into said semiconductor, which etched region is partially comprised of insulating material, the purpose thereof being to reduce leakage current at said source or drain by limiting the area of Schottky barrier junctions in contact with said semiconductor to regions at ends of the associated semiconductor channel region.

A method of configuring a Metal Oxide Semiconductor (MOS) gate voltage controlled rectification direction device and voltage controlled switch with operating characteristics similar to a non-latching Silicon Controlled Rectifier (SCR), on N-type semiconductor comprising:

• a. providing a (MOSFET) with a rectifying Schottky barrier first junction and a non-rectifying second junction present in a surface region of an N-type semiconductor, said first and second junctions being separated by a channel region in said N-type semiconductor, said channel region having an insulator region and gate sequentially situated adjacent thereto;
• b. applying a constant positive polarity voltage between said second and first junctions such that said rectifying Schottky barrier first junction is reverse biased, but conducts forward biased current if said applied second to first junction voltage polarity is reversed;
• c. applying a negative polarity gate voltage such that the channel region is caused to be inverted P-type by the attraction of holes thereto, thereby effecting a forward bias between said inverted channel region and said rectifying Schottky barrier first junction, such that forward biased current flows therethrough;
• the basis of operation being that said Schottky barrier first junction is formed between said semiconductor channel region and a material which provides a rectifying junction to said semiconductor channel region when it is doped either N or P-type.

A method of configuring a Metal Oxide Semiconductor (MOS) gate voltage controlled rectification direction device and voltage controlled switch with operating characteristics similar to a non-latching Silicon Controlled Rectifier (SCR), on P-type semiconductor comprising:

• a. providing a (MOSFET) with a rectifying Schottky barrier first junction and a non-rectifying second junction in a surface region of a P-type semiconductor, said first and second junctions being separated by a channel region in said P-type semiconductor, said channel region having an insulator region and gate sequentially situated adjacent thereto;
• b. applying a constant negative polarity voltage between said second and first junctions such that said rectifying Schottky barrier first junction is reverse biased, but conducts forward biased current if said second to first junction voltage polarity is reversed;
• c. applying a positive polarity gate voltage such that the channel region is caused to be inverted N-type by the attraction of electrons thereto, thereby effecting a forward bias between said inverted channel region and said rectifying Schottky barrier first junction, such that forward biased current flows therethrough;
• the basis of operation being that said Schottky barrier first junction is formed between a said semiconductor channel region and a material which provides a rectifying junction to said semiconductor channel region when it is doped either N or P-type.

A method of configuring a Metal Oxide Semiconductor (MOS) gate voltage controlled rectification direction device and voltage controlled switch with operating characteristics similar to a non-latching Silicon Controlled Rectifier (SCR), on intrinsic semiconductor comprising:

• a. providing, in a surface region of an intrinsic semiconductor substrate, a (MOSFET) with a rectifying Schottky barrier first junction and a non-rectifying second junction which are apparent when a constant polarity voltage is applied between said first and second junctions while a constant effective channel region doping level effecting polarity voltage is applied to a gate thereof, said first and second junctions being separated by said channel region in said intrinsic semiconductor substrate, said channel region having an insulator region and said gate sequentially situated adjacent thereto;
• b. applying a constant polarity voltage to said gate and a constant polarity voltage between said second and first junctions such that said rectifying Schottky barrier first junction is reverse biased, but conducts forward biased current if said second to first junction voltage polarity is reversed;
• c. reversing the polarity of the constant polarity gate voltage such that the channel region is caused to be of a doping type such that said rectifying Schottky barrier first junction is forward biased, such that forward biased current flows therethrough;
• the basis of operation being that said Schottky barrier first junction is formed between said semiconductor channel region and a material which provides a rectifying junction to said semiconductor channel region when it is doped either N or P-type.

A method of configuring a modulator comprising the steps of:

• a. providing a MOSFET structure with a rectifying Schottky barrier junction present at at least one location selected from the group consisting of a source to semiconductor channel region and a drain to semiconductor channel region present in the surface region of a semiconductor, wherein said semiconductor channel region is present directly between said source and drain junctions, and adjacent to which semiconductor channel region is progressively present an insultaing material and a gate, to which semiconductor channel region access is provided via a channel accessing region junction;
• b. applying varying drain to source voltage;
• and
• c. simultaneously applying varying gate to source voltage and monitoring a modulated resulting voltage presenting at the channel accessing region;
• such that the voltage monitored at said channel accessing region is a modulated result of said applied drain and gate to source voltages.

A method of configuring a modulator comprising the steps of:

• a. providing a MOSFET structure with non-rectifying source to first channel region and drain to a second channel region junctions present in the surface region of a semiconductor, wherein a rectifying Schottky barrier junction region separates said first and second channel regions, said source and drain being set apart from said Schottky barrier junction region by said first and second semiconductor channel regions respectively, adjacent to each of which first and second semiconductor channel regions is progressively present an insultaing material and a gate, with access being available to said Schottky barrier region via a junction thereto;
• b. applying varying drain to source voltage;
• and
• c. simultaneously applying varying gate to source voltage and monitoring a modulated resulting voltage presenting at the Schottky barrier junction region;
• such that the voltage monitored at said Schottky barrier junction region is a modulated result of said applied drain and gate to source voltages.

A Metal Oxide Semiconductor (MOS) device system allowing control of a monitored voltage, said system being selected from the group consisting of:

• a. a non-inverting single (MOS) device comprising a semiconductor channel region and two rectifying Schottky barrier to channel region junctions in a surface region of a single doping type semiconductor, said rectifying Schottky barrier to channel region junctions being separated by said semiconductor channel region, wherein a gate to which semiconductor channel region doping type modulating voltage can be applied is associated with said semiconductor channel region, said gate being offset from said semiconductor channel region by an insulating material, said monitored voltage being accessed at a junction to said semiconductor channel;
• and
• b. an inverting single (MOS) device comprising first and second essentially non-rectifying channel region junctions in a surface region of a single doping type semiconductor, said first and second essentially non-rectifying channel region junctions being separated by first and second semiconductor channel regions from electrically interconnected rectifying Schottky barrier to channel region junctions, wherein first and second gates to which semiconductor channel region doping type effecting modulating gate voltage can be applied are associated with said first and second semiconductor channel regions, said first and second gates being offset from said first and second semiconductor channel regions, respectively, by insulating material, said monitored voltage being accessed at a junction to the electrically interconnected rectifying Schottky barriers at a location between said first and second channel regions;
• such that in use application of a positive polarity voltage to a gate causes an associated channel region to become effectively N-type by the attraction of electrons thereinto and application of a negative polarity voltage to said gate caused the channel region to become effectively P-type by attraction of holes thereinto, and such that a Schottky barrier to channel region junction is rectifying to said channel with either channel region effective doping present, but such that the direction of forward conduction through a rectifying Schottky barrier to channel region junction with effective N-type doping present is opposite to that with effective P-type doping present such that:
• a. when a constant polarity voltage is applied between said first and second Schottky barrier junctions in said non-inverting single (MOS) device and said channel region effective doping is caused to switch from one effective doping type (N-type/P-type) to the other (P-type/N-type), by the changing of applied gate voltage polarity, the monitored voltage present in said channel region, at said junction thereto, between said first and second Schottky barrier junctions changes from essentially that applied to one of said first and second Schottky barrier junctions to that applied to the other of said first and second Schottky barrier junctions, because of the reversal of forward conduction direction in said Schottky barrier to channel region junctions;
• b. when a constant polarity voltage is applied between said first and second essentially non-rectifying channel region junctions in said inverting single (MOS) device, and said first and second channel regions effective doping is caused to switch from one effective doping type (N-type/P-type) to the other (P-type/N-type), by the changing of applied first and second gate voltage polarity, the monitored voltage present at junction to the electrically interconnected rectifying Schottky barrier junctions changes from essentially that applied to one of said first and second non-rectifying junctions to that applied to the other of said first and second non-rectifying junctions, because of the reversal of forward conduction direction in said Schottky barrier to channel region junctions.

A noninverting single Metal Oxide Semiconductor (MOS) device with operating characteristics similar to multiple device Complimentary Metal Oxide Semiconductor (CMOS) systems in which an applied gate voltage controls a voltage present at an essentially electrically isolated terminal thereof;

• comprising first and second rectifying Schottky barrier channel region junctions in a surface region of a single doping type semiconductor, said first and second rectifying Schottky barrier channel region junctions being separated by first and second semiconductor channel regions from electrically interconnected essentially nonrectifying channel region junctions, wherein first and second gates to which semiconductor channel region doping type effecting modulating gate voltage can be applied are associated with said first and second semiconductor channel regions, said first and second gates being offset from said first and second semiconductor channel regions, respectively, by insulating material, such that application of a sufficient negative voltage to the first and second gates will attract holes into said first and second semiconductor channel regions, and such that application of a sufficient positive voltage to the first and second gates will attract electrons into said first and second semiconductor channel regions, the purpose of applying such gate voltage being to modulate the effective doping type of said first and second semiconductor channel regions, such that when a constant polarity voltage is applied between said first and second rectifying Schottky barrier channel region junctions one rectifying Schottky barrier to channel region junction forward conducts while the other simultaneously does not, which Schottky barrier to channel region junction forward conducts at a specific time being determined by semiconductor doping type in said first and second semiconductor channel regions, said semiconductor doping type being determined by applied gate voltage polarity, which essentially electrically isolated terminal electrically contacts, via a junction thereto, said electrically interconnected essentially nonrectifying channel region junctions between said first and second semiconductor channel regions and during use monitors a constant polarity voltage applied to one of the first and second rectifying Schottky barrier to channel region junctions, which constant polarity voltage appears at said essentially electrically isolated terminal essentially through the forward conducting Schottky barrier to channel region junction, which constant polarity voltage monitored by said essentially electrically isolated terminal increases when the gate voltage applied to said first and second gates is increased;
• the basis of operation being that said Schottky barrier junctions are formed between said first and second semiconductor channel regions and a material which provides a rectifying junction to a semiconductor channel region when it is doped either N or P-type.

A Metal Oxide Semiconductor (MOS) device comprising first and second junctions at first and second ends of a channel region selected from the group consisting of a continuous channel region and at least two electrically interconnected channel regions, at least one of which junctions is a rectifying Schottky barrier junction, said first and second junctions being separated by said channel region and said channel region having insulator material and gate sequentially situated adjacent thereto, said (MOS) device further comprising an essentially electrically isolated junction to a point thereof, located between said first and second junctions such that applying a constant polarity voltage between said second and first junctions causes said at least one rectifying Schottky barrier junction to be reverse biased when said channel region doping is caused to be of a first type selected from the group selected from N-type and P-type, but such that it becomes forward biased if said applied second to first junction voltage polarity is reversed, and such that applying a channel region effective doping type inverting polarity voltage to the gate effects a forward bias between said inverted doping type channel region and said at least one rectifying Schottky barrier junction, which essentially electrically isolated junction monitors a voltage appearing thereat essentially through said forward biased rectifying Schottky barrier junction in use, the basis of operation being that said rectifying Schottky barrier junction is formed between said semiconductor channel region and a material which provides a rectifying junction to said semiconductor channel region when it is doped either N or P-type.