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US 5,661,388 AGranted
Positioning method and positioning system
AssigneeCanon Kabushiki Kaisha
InventorHiroshi Kurosawa
Life of this patent
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Abstract
A positioning method and positioning system wherein a driving device, for moving a movable table on a rough-motion stage by a small amount, is alternately controlled through a pair of switchable control systems. The amounts by which the table is driven are initially adjusted to the same amounts by the pair of control systems when the paired control systems are switched.
Claims15
A positioning method, comprising:
- controlling driving means, for moving a movable table on a rough-motion stage by a small amount, alternately through a pair of control systems being able to be switched;
- and
- adjusting control amounts of the paired control systems to the same amounts, when the paired control systems are switched.
A positioning system, comprising:
- driving means for moving a movable table on a rough-motion stage by a small amount;
- a pair of control systems being able to be switched and for alternately controlling said driving means;
- and
- branching means for applying a control amount of one of said pair of control systems to the other of said pair of control systems.
1 more element
An exposure apparatus, comprising:
- a positioning system comprising:
- driving means for moving a movable table on a rough-motion stage by a small amount;
- a pair of control systems being able to be switched and for alternately controlling said driving means;
- branching means for applying a control amount of one of said pair of control systems to the other of said pair of control systems;
- and
- exposure means for exposing an object positioned by said positioning system.
3 more elements
Dependencies are inferred from the claim text.