Multi-dimensional capacitive transducer
AssigneeHysitron, Inc.
InventorWayne A. Bonin
Life of this patent
Estimating the term…
Abstract
High precision force imparting and/or a force (including weight) and displacement measuring/indicating device which includes a multi-dimensional capacitor transducer system. The multi-dimensional transducer includes a first capacitive transducer for imparting force or movement and/or detecting force, weight or position in a first direction and a second capacitive transducer for imparting force or movement and/or detecting force, weight or position in a second direction. The multi-dimensional transducer may be used to provide in situ imaging in micro-mechanical test systems.
Claims34
A high precision multi-dimensional transducer comprising:
- a first capacitive transducer including means for imparting force or movement and/or detecting force, weight, or position in a first direction via a pick-up plate movably mounted relative to a drive plate therein;
- and
- a second capacitive transducer including means for imparting force or movement and/or detecting force, weight, or position in a second direction via a pick-up plate movably mounted relative to a drive plate therein.
A high precision multi-dimensional transducer comprising:
- a first capacitive transducer for imparting force or movement and/or detecting force, weight, or position in a first direction having a pick-up plate movably mounted relative to a drive plate therein;
- a second capacitive transducer for imparting force or movement and/or detecting force, weight, or position in a second direction having a pick-up plate movably mounted relative to a drive plate therein;
- a third capacitive transducer for imparting force or movement and/or detecting force, weight or position in a third direction having a pick-up plate movably mounted therein;
- and
- a fourth capacitive transducer for imparting force or movement and/or detecting force, weight or position in the second direction having a pick-up plate movably mounted relative to a drive plate therein.
A high precision multi-dimensional transducer comprising:
- a first capacitive transducer for imparting force or movement and/or detecting force, weight, or position in a first direction having a pick-up plate movably mounted relative to a drive plate therein;
- a second capacitive transducer for imparting force or movement and/or detecting force, weight, or position in a second direction having a pick-up plate movably mounted relative to a drive plate therein;
- and
- a third capacitive transducer for imparting force or movement and/or detecting force, weight or position in the second direction having a pick-up plate movably mounted relative to a drive plate therein.
A high precision, multi-dimensional transducer comprising:
- a first capacitive transducer for detecting force, weight or position in a first direction having a pick-up plate movably mounted relative to a drive plate therein;
- a second capacitive transducer for detecting force, weight or position in a second direction having a pick-up plate movably mounted relative to a drive plate therein;
- means to couple each pick-up plate to a remote object;
- and
- means to generate an output signal proportional to the force, weight or position detected.
In a scanned probe microscope apparatus, the improvement comprising a high precision multi-dimensional transducer including:
- a first capacitive transducer including means for imparting force or movement and/or detecting force, weight or position in a first direction via a pick-up plate movably mounted relative to a drive plate therein;
- and
- a second capacitive transducer including means for imparting force or movement and/or detecting force, weight, or position in a second direction via a pick-up plate movably mounted relative to a drive plate therein.
In a scanned probe microscope apparatus, the improvement comprising a high precision multi-dimensional transducer including:
- a first capacitive transducer for imparting force or movement and/or detecting force, weight or position in a first direction having a pick-up plate movably mounted relative to a drive plate therein;
- a second capacitive transducer for imparting force or movement and/or detecting force, weight, or position in a second direction having a pick-up plate movably mounted relative to a drive plate therein;
- and
- a third capacitive transducer for imparting force or movement and/or detecting force, weight, or position in the second direction having a pick-up plate movably mounted therein.
A method of performing a micro-mechanical test on a sample comprising the steps of placing the sample, and performing the micro-mechanical test using a high-precision, multi-dimensional capacitive transducer, wherein the step of performing the micro-mechanical test using the multi-dimensional capacitive transducer further comprises the steps of:
- imparting force or movement and/or detecting force weight, or position in a first direction;
- and
- imparting force or movement and/or detecting force, weight, or position in a second direction.
A method of performing a micro-mechanical test on a sample comprising the steps of placing the sample, and performing the micro-mechanical test using a high-precision, multi-dimensional capacitive transducer, wherein the step of performing the micro-mechanical test using the multi-dimensional capacitive transducer further comprises the steps of:
- imparting force or movement and/or detecting force, weight, or position in a first direction;
- and
- imparting force or movement and/or detecting force, weight, or position in a second direction
- wherein the step of performing the micro-mechanical test using a high-precision, multi-dimensional capacitive transducer further comprises the step of imparting force or movement and/or detecting force, weight or position in a third direction.
In a scanned probe microscope apparatus having a piezo scanner for moving a sample relative to a tip, the improvement comprising:
- means for surface imaging and multi-axis force and/or displacement measurement including a multi-dimensional transducer having,
- a first capacitive transducer including means for detecting force, weight or position in a first direction having a pick-up plate movably mounted relative to a drive plate therein, and
- a second capacitive transducer including means for detecting force, weight or position in a second direction having a pick-up plate movably mounted relative to a drive plate therein;
- means to couple each pick-up plate to a remote object;
- and
- means to generate an output signal proportional to the force, weight or position detected.
In a scanned probe microscope apparatus, the improvement comprising:
- a multi-dimensional capacitive transducer;
- means coupled to the transducer for surface imaging, multi-axis force and/or displacement measurement;
- and
- means coupled to the transducer for application of multi-axis force and/or displacement.
An instrument for providing high resolution surface imaging and micro-mechanical properties test, the instrument comprising:
- a probe;
- means for scanning, including providing relative motion between the probe and a sample, the means for scanning including a multi-dimensional transducer;
- and
- a controller coupled to the multi-dimensional transducer, including a data acquisition and control system and an electrostatic controller.
A high precision multi-dimensional transducer comprising:
- a first capacitive transducer including means for imparting force or movement and/or detecting force, weight, or position in a first direction via a pick-up plate movably mounted relative to a drive plate therein;
- a second capacitive transducer including means for imparting force or movement and/or detecting force, weight, or position in a second direction via a pick-up plate movably mounted relative to a drive plate therein;
- and
- means for mechanically coupling the first capacitive transducer pick-up plate to the second capacitive transducer pick-up plate.
Dependencies are inferred from the claim text.