Vacuum maintenance device for high vacuum chambers
AssigneeColor Planar Displays, Inc.
InventorRichard K. Alderson
Life of this patent
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Abstract
An ion pump permits the continuous evacuation of a small-envelope vacuum chamber while drawing a relatively small amount of power (micro watts). In a preferred embodiment, the present ion pump, due to its small size and integration within the vacuum chamber, enables the device in which the vacuum chamber is incorporated to be portable and to retain its original dimensions.
Claims10
A device for the maintenance of high vacuum within a primary vacuum chamber, comprising:
- an ion pump vacuum chamber, separated from the primary vacuum chamber by a gas-permeable, optically-opaque shield;
- an electron source situated on one side of said ion pump vacuum chamber, and connected to one terminal of a potential source;
- an anode situated within said ion pump vacuum chamber in a position across said ion pump vacuum chamber from said electron source, and connected to an opposite terminal of said potential source;
- and
- a layer of active material supported by a wall of said ion pump vacuum chamber and situated in close proximity to said electron source.
A device for the maintenance of high vacuum within a primary vacuum chamber, comprising:
- an ion pump vacuum chamber, separated from the primary vacuum chamber by a gas-permeable, optically-opaque shield;
- an electron source situated on one side of said ion pump vacuum chamber, and connected to one terminal of a potential source;
- an anode situated within said ion pump vacuum chamber in a position across said ion pump vacuum chamber from said electron source, and connected to an opposite terminal of said potential source;
- and
- a layer of active material supported by a wall of said ion pump vacuum chamber and situated in close proximity to said electron source;
- wherein the primary vacuum chamber is a planar vacuum chamber having a major axis and a minor axis and first and second side surfaces parallel to said minor axis, and wherein said ion pump vacuum chamber is situated within and along one edge of said planar vacuum chamber, with said anode being placed on said first side surface, and said electron source being placed on said second side surface opposite said anode, permitting electrons to flow from said electron source to said anode in a plane perpendicular to said first and second side surfaces.
A device for the maintenance of high vacuum within a primary vacuum chamber, comprising:
- an ion pump vacuum chamber, separated from the primary vacuum chamber by a gas-permeable, optically-opaque shield;
- an electron source situated on one side of said ion pump vacuum chamber, and connected to one terminal of a potential source;
- an anode situated within said ion pump vacuum chamber in a position across said ion pump vacuum chamber from said electron source, and connected to an opposite terminal of said potential source;
- and
- a layer of active material supported by a wall of said ion pump vacuum chamber and situated in close proximity to said electron source;
- wherein the primary vacuum chamber is a planar vacuum chamber having a major axis and a minor axis and first and second planar surfaces parallel to said major axis, and wherein said ion pump vacuum chamber is situated within and along one edge of said planar vacuum chamber, with said anode being placed on said first planar surface, and said electron source being placed on said second planar surface opposite said anode, permitting electrons to flow from said electron source to said anode in a plane perpendicular to said first and second planar surfaces.
Dependencies are inferred from the claim text.