Method and apparatus for CO.sub.2 cleaning with mitigated ESD

An apparatus for cleaning an object having at least a first surface, comprising:

• a means for transporting the object along a path from a first position to a second position;
• a first spray mechanism including a source of water for directing a first water mist at the first surface of the object as the object is transported along the path to said first position to form a substantially continuous film of water across the first surface of said object, said film having a given conductivity value;
• a means including a source of solid carbon dioxide (CO.sub.2) for forming a stream of solid carbon dioxide (CO.sub.2) particles;
• a second spray mechanism comprising:
• a) a means including said source of water for directing a second mist of water into the stream of said solid CO.sub.2 particles to form a combined stream of water mist and CO.sub.2 particles in which the water droplets in the second mist combine with at least one of the CO.sub.2 particles to produce carbonic acid (H.sub.2 CO.sub.3);
• and b) a means for contacting the combined stream with the substantially continuous water film formed on said first surface as said object is transported from said first position to said second position, wherein said carbonic acid dissociates into charged ions which distribute within the water film, thereby increasing the conductivity value of the water film formed on said first surface, said contact of CO.sub.2 particles in the combined stream substantially removing residue present on the first surface of said object, thereby cleaning the object.