Method of making polycrystalline thin film and superconducting oxide body
AssigneeFujikura Ltd.
InventorsYasuhiro Iijima, Nobuo Tanabe
Life of this patent
Estimating the term…
Abstract
The present invention relates to a polycrystalline thin film deposit acting as a substrate material composed of grains of a cubic structure in which the intergranular misorientation, defined as the orientation difference between the a-axes (or b-axes) of the neighboring grains, is less than 30 degrees. Such a substrate base is produced by depositing a target material on a base material by sputtering while irradiating the substrate base with ion beams at an oblique angle to the base. The preferred range of the oblique angle is between 40 to 60 degrees. Examples are presented of application of such textured polycrystalline substrate base for the production of superconducting oxide thin layer of outstanding superconducting properties.
Claims27
A method of making a polycrystalline yttrium stabilized zirconia thin film on a metal substrate base, said polycrystalline yttrium stabilized zirconia thin film having a plurality of grains of a cubic crystal structure defined by a-, b- and c-axes, said polycrystalline yttrium stabilized zirconia thin film being formed such that the intergranular misorientation, defined by a range of orientation of said a-axes or said b-axes, is not more than 30 degrees, and said c-axes are perpendicular to a surface of said metal substrate base, comprising the steps of:
- (a) placing said metal substrate base on a deposition vessel;
- (b) depositing constituting elements of a target material on said metal substrate base so as to form said polycrystalline yttrium stabilized zirconia thin film;
- wherein during the step (b), the surface of said polycrystalline yttrium stabilized zirconia thin film being formed on said metal substrate base is irradiated with ion beam at an oblique incidence angle to said polycrystalline thin film, and
- wherein said oblique incidence angle is selected to be not less than 40 degrees and not more than 60 degrees.
A method of making a superconducting oxide thin film on a polycrystalline yttrium stabilized zirconia thin film having a plurality of grains of a cubic crystal structure defined by a-, b- and c-axes on a substrate base, said polycrystalline yttrium stabilized zirconia thin film being formed such that an intergranular misorientation, defined by a range of orientations of said a-axes or said b-axes is not more than 30 degrees, and said c-axes is perpendicular to a surface of said metal substrate base,
- comprising the steps of:
- (a) placing said metal substrate base on a deposition vessel;
- (b) depositing constituting elements of a target material on said metal substrate base so as to form said polycrystalline yttrium stabilized zirconia thin film;
- (c) depositing the superconducting oxide thin film on said polycrystalline yttrium stabilized zirconia thin film;
- wherein during the step (b), the surface of said polycrystalline yttrium stabilized zirconia thin film being formed on said substrate base is irradiated with an ion beam at an oblique incidence angle to said polycrystalline thin film, and
- wherein said oblique incidence angle is selected to be not less than 40 degrees and not more than 60 degrees.
Dependencies are inferred from the claim text.