Multi-axial angular velocity sensor

A multi-axial angular velocity sensor for detecting angular velocity components about respective coordinate axes in a three-dimensional coordinate system, comprising:

• a flexible substrate (110;
• 210;
• 250;
• 313) having flexibility;
• a fixed substrate (120;
• 230;
• 290;
• 340) disposed so as to oppose the flexible substrate with a predetermined distance therebetween above the flexible substrate;
• an oscillator (130;
• 211, 241;
• 260;
• 321) fixed on the lower surface of the flexible substrate;
• a sensor casing (140;
• 220, 230;
• 270, 280, 290;
• 322, 330, 340) for supporting the flexible substrate and the fixed substrate and accommodating the oscillator therewithin;
• excitation means (E0 to E5, F0 to F5;
• G0 to G10) for oscillating the oscillator in respective coordinate axial directions;
• and
• displacement detecting means (E0 to E5, F0 to F5;
• G0 to G10) for detecting displacements in respective coordinate axial directions of the oscillator.

A multi-axial angular velocity sensor for detecting angular velocity components about respective coordinate axes in a three-dimensional coordinate system, comprising:

• a flexible substrate (110;
• 250) having flexibility;
• a fixed substrate (120;
• 290) disposed so as to oppose the flexible substrate with a predetermined distance therebetween above the flexible substrate;
• an oscillator (130;
• 260) fixed on the lower surface of the flexible substrate;
• a sensor casing (140;
• 270, 280, 290) for supporting the flexible substrate and the fixed substrate and accommodating the oscillator therewithin;
• a plurality of lower electrodes (F1 to F5) provided on an upper surface of the flexible substrate;
• a plurality of upper electrodes (E1 to E5;
• E0) provided on a lower surface of the fixed substrate and disposed at positions respectively opposite to the plurality of lower electrodes;
• means (711, 712) for applying an a.c. signal across a pair of lower and upper electrodes opposite to each other to thereby oscillate the oscillator in respective coordinate axial directions;
• and
• means (721, 722) for detecting an electrostatic capacitance between a pair of lower and upper electrodes opposite to each other to thereby detect displacements in respective coordinate axial directions of the oscillator.

A multi-axial angular velocity sensor for detecting angular velocity components about at least two coordinate axes in a three-dimensional coordinate system, comprising:

• an oscillator (130;
• 211;
• 241;
• 260;
• 321;
• 440;
• 550;
• 610) having mass;
• a sensor casing (140;
• 220, 230;
• 270, 280, 290;
• 322, 330, 340;
• 450;
• 560;
• 620, 630, 660) for accommodating said oscillator therewithin;
• connection means (110;
• 212;
• 252;
• 312;
• 410;
• 510;
• 640, 650) for connecting the oscillator to the sensor casing in a state having a degree of freedom such that the oscillator can move in respective coordinate axial directions;
• excitation means (E0 to E5, F0 to F5;
• G0 to G10;
• D1 to D16;
• J1 to J6) for oscillating the oscillator in at least two coordinate axial directions;
• and
• displacement detecting means (E0 to E5, F0 to F5;
• G0 to G10;
• Rx1 to Rx4;
• Ry1 to Ry4, Rz1 to Rz4;
• D1 to D16;
• J1 to J6) for detecting displacements in at least two coordinate axial directions of the oscillator.

A multi-axial angular velocity sensor for detecting angular velocity components about two coordinate axes (Y, Z) in a three-dimensional coordinate system, comprising:

• an oscillator (130;
• 211;
• 241;
• 260;
• 321;
• 440;
• 550;
• 610) having mass;
• a sensor casing (140;
• 220, 230;
• 270, 280, 290;
• 322, 330, 340;
• 450;
• 560;
• 620, 630, 660) for accommodating said oscillator therewithin;
• connection means (110;
• 212;
• 252;
• 312;
• 410;
• 510;
• 640, 650) for connecting the oscillator to the sensor casing in a state having a degree of freedom such that the oscillator can move in respective coordinate axial (X, Y, Z) directions;
• excitation means (E0 to E2, F0 to F2;
• G0 to G4, G6 to G9;
• D1 to D4;
• J1, J2) for oscillating the oscillator in a first coordinate axial (X) direction;
• and
• displacement detecting means (E0, E3 to E5, F0, F3 to F5;
• G0 to G10;
• Ry1 to Ry1, Rz1 to Rz1;
• D5 to D16;
• J3 to J6) for detecting displacements in a second coordinate axial (Y) direction and in a third coordinate axial (Z) direction of the oscillator;
• to detect an angular velocity component about the third coordinate axis (Z) on the basis of a displacement in the second coordinate axial (Y) direction detected by the displacement detecting means;
• and
• to detect an angular velocity component about the second coordinate axis (Y) on the basis of a displacement in the third coordinate axial (Z) direction detected by the displacement detecting means.

A multi-axial angular velocity sensor for detecting angular velocity components about two coordinate axes (X, Y) in a three-dimensional coordinate system, comprising:

• an oscillator (130;
• 211;
• 241;
• 260;
• 321;
• 440;
• 550;
• 610) having mass;
• a sensor casing (140;
• 220, 230;
• 270, 280, 290;
• 322, 330, 340;
• 450;
• 560;
• 620, 630, 660) for accommodating said oscillator therewithin;
• connection means (110;
• 212;
• 252;
• 312;
• 410;
• 510;
• 640, 650) for connecting the oscillator to the sensor casing in a state having a degree of freedom such that the oscillator can move in respective coordinate axial (X, Y, Z) directions;
• excitation means (E0 to E4, F0 to F4;
• G0 to G4, G6 to G9;
• D1 to D8;
• J1 to J4) for oscillating the oscillator in a first coordinate axial (X) direction and in a second coordinate axial (Y) direction;
• and
• displacement detecting means (E0, E5, F0, F5;
• G0, G5, G10;
• Rz1 to Rz1;
• D9 to D16;
• J5, J6) for detecting a displacement in a third coordinate axial (Z) direction of the oscillator;
• to detect an angular velocity component about the second coordinate axis (Y) on the basis of a displacement in the third coordinate axial (Z) direction detected by the displacement detecting means when the oscillator is oscillating in the first coordinate axial (X) direction;
• and
• to detect an angular velocity component about the first coordinate axis (X) on the basis of a displacement in the third coordinate axial (Z) direction detected by the displacement detecting means when the oscillator is oscillating in the second coordinate axial (Y) direction.

A multi-axial angular velocity sensor for detecting angular velocity components about respective coordinate axes (X, Y, Z) in a three-dimensional coordinate system, comprising:

• an oscillator (130;
• 211;
• 241;
• 260;
• 321;
• 440;
• 550;
• 610) having mass;
• a sensor casing (140;
• 220, 230;
• 270, 280, 290;
• 322, 330, 340;
• 450;
• 560;
• 620, 630, 660) for accommodating said oscillator therewithin;
• connection means (110;
• 212;
• 252;
• 312;
• 410;
• 510;
• 640, 650) for connecting the oscillator to the sensor casing in a state having a degree of freedom such that the oscillator can move in respective coordinate axial directions;
• excitation means (E0 to E4, F0 to F4;
• G0 to G4, G6 to G9;
• D1 to D8;
• J1 to J4) for oscillating the oscillator in a first coordinate axial (X) direction and in a second coordinate axial (Y) direction;
• and
• displacement detecting means (E0, E3 to E5, F0, F3 to F5;
• G0 to G10;
• Ry1 to Ry1, Rz1 to Rz1;
• D5 to D16;
• J3 to J6) for detecting a displacement in the second coordinate axial (Y) direction and a displacement in a third coordinate axial (Z) direction of the oscillator;
• to detect an angular velocity component about the third coordinate axis (Z) on the basis of a displacement in the second coordinate axial (Y) direction detected by the displacement detecting means when the oscillator is oscillating in the first coordinate axial (X) direction,
• to detect an angular velocity component about the second coordinate axis (Y) on the basis of a displacement in the third coordinate axial (Z) direction detected by the displacement detecting means when the oscillator is oscillating in the first coordinate axial (X) direction, and
• to detect an angular velocity component about the first coordinate axis (X) on the basis of a displacement in the third coordinate axial (Z) direction detected by the displacement detecting means when the oscillator is oscillating in the second coordinate axial (Y) direction.