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US 5,641,960 AGranted
Circuit pattern inspecting device and method and circuit pattern arrangement suitable for the method
AssigneeFujitsu Limited
InventorsKazuo Okubo, Masafumi Asai
Life of this patent
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Abstract
A circuit pattern inspection device includes a stage on which circuit patterns to be inspected are arranged so as to be symmetrical about a center of the stage about which the stage can rotate, a plurality of sensors which are positioned with respect to the center and scan the circuit patterns, and a signal processing circuit which determines whether or not the circuit patterns are normal on the basis of output signals of the plurality of sensors.
Claims14
A circuit pattern inspection device comprising:
- a stage on which circuit patterns to be inspected are arranged so as to be symmetrical about a center of the stage about which the stage is rotatable;
- a plurality of sensors which are positioned at respective, different positions relatively to the center and which scan the circuit patterns;
- and
- a signal processing circuit which determines whether or not the circuit patterns are normal on the basis of respective output signals of the plurality of sensors.
1 more element
A method for inspecting circuit patterns comprising the steps of:
- (a) rotating a stage on which circuit patterns to be inspected are arranged so as to be symmetrical about a center of the stage;
- (b) scanning the circuit patterns by a plurality of sensors which are positioned at respective locations relatively to the center;
- and
- (c) determining whether or not the circuit patterns are normal on the basis of respective output signals of the plurality of sensors.
1 more element
Dependencies are inferred from the claim text.