US 5,641,391 A · Three dimensional microfabrication by localized electrodeposition and etching

Abstract

Embodiments of the present invention provide a new method for producing a three dimensional object, particularly suited to microfabrication applications. The method includes the steps of providing a substrate with a conducting interface, an electrode having a feature or features that are small relative to the substrate, and a solution. The solution has a reactant that will either etch the substrate or deposit a selected material in an electrochemical reaction. The electrode feature is placed close to but spaced from the interface. A current is passed between the electrode and the interface, through the solution, inducing a localized electrochemical reaction at the interface, resulting in either the deposition of material or the etching of the substrate. Relatively moving the electrode and the substrate along a selected trajectory, including motion normal to the interface, enables the fabrication of a three dimensional object. In an alternative embodiment, current is passed through an orifice placed close to but spaced from the substrate surface, and may be accompanied by forced convection through the orifice. The method provides the potential to fabricate using many materials, including metals, alloys, polymers and semiconductors in three dimensional forms and with sub-micrometer spatial resolution.

Claims17

Dependent claims

A method for producing a three dimensional object comprising the steps of

(a) providing a substrate having an outer conducting surface defining an interface;
(b) providing an electrode having at least a feature having at least a dimension that is small relative to the dimensions of the interface;
(c) providing a solution having a selected reactant that will, in an electrochemical reaction, deposit a desired product;
(d) positioning the feature at a starting distance from the substrate such that the feature is close to but spaced from the interface;
(e) selecting a trajectory for relatively moving the electrode and the substrate, at least part of the trajectory having a directional component normal to the substrate surface, such that when the trajectory is followed a feature to substrate separation of at least several times the starting distance is generated somewhere along the trajectory;
(f) depositing the product by passing a current between the electrode and the substrate and through the solution to induce a spatially localized electrochemical reaction at the interface;
(g) relatively moving the electrode and the substrate along the trajectory;
and
(h) repeating step (f) along the trajectory;
where the depositing of the product along the trajectory, including at one or more locations several times the starting distance away from the substrate, forms the three dimensional object.

7 more elements

A method for producing a three dimensional object comprising the steps of

(a) providing a substrate having an outer conducting surface defining an interface;
(b) providing an electrode having at least a feature having at least a dimension that is small relative to the dimensions of the interface;
(c) providing a solution having a selected reactant that will, in an electrochemical reaction, etch the substrate;
(d) positioning the feature at a starting distance from the substrate such that the feature is close to but spaced from the interface;
(e) selecting a trajectory for relatively moving the electrode and the substrate, at least part of the trajectory having a directional component normal to the substrate surface, such that when the trajectory is followed while etching the electrode feature penetrates at least several times the starting distance into the etched substrate somewhere along the trajectory;
(f) etching the substrate by passing a current between the electrode and the substrate and through the solution to induce a spatially localized electrochemical reaction at the interface;
(g) relatively moving the electrode and the substrate along the trajectory;
and
(h) repeating step (f) along the trajectory;
where the etching of the substrate along the trajectory, including at one or more locations penetrating several times the starting distance into the substrate, forms the object.

7 more elements

Dependencies are inferred from the claim text.

Three dimensional microfabrication by localized electrodeposition and etching

Life of this patent

Three dimensional microfabrication by localized electrodeposition and etching

Life of this patent

Abstract

Claims17