Process for nitrogen trifluoride synthesis
AssigneeAir Products and Chemicals, Inc.
InventorsDaniel G. Coronell, Thomas H.-L. Hsiung, Howard P. Withers, Jr., Andrew J. Woytek
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Abstract
The present invention is directed to a method for the synthesis of nitrogen trifluoride from elemental fluorine gas and a source of ammonia in a gas-liquid phase reaction comprising; 3 F.sub.2 +NH.sub.4 H.sub.(x-1) F.sub.x .fwdarw.NF.sub.3 +(3+x)HF wherein the melt ratio HF/NH.sub.3 represented by x in the above formula is at least 2.55 and the reaction liquid is agitated or mixed with a mixing apparatus with power input to the mixing apparatus at a high level equivalent to or greater than 1000 watts per cubic meter. This improved synthesis method allows for enhanced nitrogen trifluoride yields of 70% or greater.
Claims24
A method for synthesis of NF.sub.3 by the reaction of a fluorine reactant and an NH.sub.4 H.sub.(x-1) F.sub.x reactant, where x is equal to or greater than 2.55, and said reactants are mixed using a mixing means at a mixing level achieved by input of power to said mixing means of greater than or equal to 1000 watts per cubic meter on the basis of a flat blade turbine.
A method for synthesis of NF.sub.3 by the reaction of a fluorine reactant and an ammonium complex reactant selected from the group consisting of NH.sub.4 H.sub.(x-1) F.sub.x, (NH.sub.4).sub.y MF.sub.z.nHF and mixtures thereof where x is equal to or greater than 2.55, y is 1-4, z is 2-8, n is sufficient at reaction conditions to maintain said ammonium complex reactant substantially as a liquid and M is selected from the group consisting of elements from Group IA through VA, Group IB through VIIB and Group VIII of the Periodic Table of the Elements, and said reactants are mixed at a rate to maintain a percent NF.sub.3 selectivity of greater than or equal to 50 percent.
A method for synthesis of NF.sub.3 by the reaction of a fluorine reactant and an ammonium complex reactant of NH.sub.4 H.sub.(x-1) F.sub.x, where x is equal to or greater than 2.55, and said reactants are mixed at a rate to maintain a percent NF.sub.3 yield of at least 65 percent.
A method for synthesis of NF.sub.3 by the reaction of a fluorine reactant and an ammonium complex reactant selected from the group consisting of NH.sub.4 H.sub.(x-1) F.sub.x, (NH.sub.4).sub.y MF.sub.z.nHF and mixtures thereof where x is equal to or greater than 2.55, y is 1-4, z is 2-8, n is sufficient at reaction conditions to maintain said ammonium complex reactant substantially as a liquid and M is selected from the group consisting of elements from Group IA through VA, Group IB through VIIB and Group VIII of the Periodic Table of the Elements and mixtures thereof, and said reactants are mixed at a rate to maintain a percent NF.sub.3 yield of at least 65 percent.
Dependencies are inferred from the claim text.