Thin film actuated mirror array

A method for manufacturing an array of M.times.N thin film actuated mirrors, wherein M and N are integers, said method comprising the steps of:

• (a) providing an active matrix having a top surface, the active matrix including a substrate, an array of M.times.N pairs of connecting terminals on the top surface thereof;
• (b) forming a sacrificial layer on the top surface of the active matrix in such a way that the sacrificial layer completely covers the array of M.times.N pairs of connecting terminals;
• (c) removing portions of the sacrificial layer surrounding each pair of the connecting terminals;
• (d) forming a supporting member around each of connecting terminals by filling the portions with an insulating material;
• (e) depositing an elastic layer, made of an insulating material, on top of the sacrificial layer including the supporting members;
• (f) forming a conduit in each of the supporting members, each of the conduits extending from top of the elastic layer to each of the connecting terminals;
• (g) depositing a second thin film layer made of an electrically conducting material on top of the elastic layer;
• (h) forming an electrodisplacive layer on top of the second thin film layer to thereby form a semifinished actuating structure;
• (i) patterning the elastic layer, the second layer and the electrodisplacive layer of the semifinished actuating structure until the sacrificial layer is exposed to thereby form an array of M.times.N semifinished actuated mirror structures, wherein each of the semifinished actuated mirror structures includes an electrodisplacive layer, a second electrode layer and an elastic member;
• (j) heat treating the array of M.times.N semifinished actuated mirror structures to thereby force a phase transition to take place in the electrodisplacive layer in each of the semifinished actuated mirror structures;
• (k) depositing a first thin film layer made of an electrically conducting and light reflecting material on each of the semifinished actuated mirror structures to form an array of M.times.N actuated mirror structures, wherein each of the actuated mirror structures includes a top and four side surfaces;
• (l) covering completely each of the actuated mirror structures with a thin film protection layer to thereby form an array of M.times.N protected actuated mirror structures;
• and
• (m) removing the thin film protection layer on the four side surfaces in each of the protected actuated mirror structures and the sacrificial layer to thereby form said array of M.times.N thin film actuated mirrors.