Apparatus for measuring surface shape
AssigneeShin-Etsu Handotai Co., Ltd.
InventorMunehisa Yanagisawa
Life of this patent
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Abstract
An apparatus of measuring a surface shape, which enables the surface shape of a sample to be accurately and quantitatively measured by a simple procedure, is provided. A sample 1 is placed on a sample stage 3, a light is projected by an optical system 8 on the sample 1, the sample stage 3 is tilted at intervals of a unit angle and on the basis of a prescribed surface by a motor 6, a reflected light from the sample 1 is received by a CCD 16, and an operational analysis circuit 21, in response to a command from a CPU 17 and based on the data of light reception obtained by the CCD 16 at intervals of a unit tilting angle, performs an operational analysis on the surface shape of the sample.
Claims4
A method of measuring a surface shape comprising the steps of:
- projecting a light on a sample mounted on a sample stage;
- receiving reflected light from said sample;
- and
- measuring surface irregularities of said sample by superposing each of light reception data which are obtained in correspondence with locations of reflection while changing a tilting angle between said sample stage and a reference plane a plurality of times.
A method of measuring a surface shape comprising the steps of:
- projecting a light on a sample mounted on a sample stage;
- receiving a reflected light from said sample;
- extracting surface irregularities of angles no smaller than a tilting angle of a surface irregularity by quantitatively measuring the surface irregularities of said sample by superposing each of light reception data which are obtained in correspondence with locations of reflection while changing a tilting angle between said sample stage and a reference plane a plurality of times.
Dependencies are inferred from the claim text.