US 5,635,849 A · Miniature probe positioning actuator

Abstract

Disclosed is a Probe Positioning Actuator which is low in cost and mass, capable of high accelerations, relatively long stroke and compact packaging, as well as high in efficiency. The actuator assembly comprises a frame, and at least one pair of spaced apart, laterally extending, conductor carrying, flexible beams attached to the frame. A non-magnetic armature, substantially U-shaped in cross section, is attached adjacent or approximate the extended terminal ends of the beams, and a probe is attached to the base of the "U" of the armature for contacting selected points in the electrical circuit associated with the device being tested. The heart of the actuator includes a coil mounted on the upstanding legs of the U-shaped armature and arranged so that the axis of the coil is perpendicular to the base of the armature but substantially parallel to the probe tip. This arrangement places the `motor` portion of the actuator adjacent the probe and permits accurate and repeatable, fast control of not only probe tip position but probe tip movement. To complete the motor portion of the actuator, means, carried by the frame create a magnetic field across the coil, whereby upon energization of the coil, deflection of the armature (and thus the beams) occurs, effecting movement of the probe tip into contact with selected portions of the device being tested.

Claims7

Dependent claims

An actuator for accurately and selectively positioning a probe into electrical contact with an electrical circuit associated with a device and for testing the same, said actuator comprising in combination:

a frame;
at least one pair of spaced apart, laterally extending, flexible beams, with each of said beams having an attachment end attached to said frame and a free end opposite said attachment end;
an armature attached to said free end of each of said beams;
a probe attached to the armature and having a probe tip thereon for contacting selected points of an electrical circuit associated with a device being tested;
a coil attached to said armature;
and
a structure composed of magnetic material including a first permanent magnet, attached to said frame, directing a magnetic field from said permanent magnet across a portion of said coil, so that, when electrical current is driven through said coil, said magnetic field causes movement of said armature and said probe with deflection of said flexible beams.

4 more elements

An actuator for accurately and selectively positioning a probe into contact with a surface of a device for electrically testing the same, said device being adapted for receipt into an X-Y positioning apparatus, and said actuator being adapted for precise location in a plane parallel to the plane of the device being tested so that said actuator is positioned in superimposed, overlapping relation to the device being tested, comprising in addition:

a frame
at least one pair of spaced apart, laterally extending, flexible beams, with each of said beams having an attachment end attached to said frame and a free end opposite said attachment end, at least one of said beams carrying flexible conductors;
an armature attached to said free end of each of said beams thereby being cantilever supported by said beams, said armature being composed of a non-magnetic material;
a probe including a probe tip attached to said armature, said probe tip adapted for contacting selected points on the surface of said device being tested and electrically connected to conductors in one of said beams carrying flexible conductors;
a coil wound on said armature and arranged so that its axis is in parallel relation to said probe tip;
and
a structure composed of magnetic material, including a first permanent magnet, attached to said frame, directing a magnetic field from said permanent magnet across a portion of said coil, so that, when electrical current is driven through said coil, said magnetic field causes movement of said armature and said probe with deflection of said flexible beams.

4 more elements

Dependencies are inferred from the claim text.

Miniature probe positioning actuator

Life of this patent

Miniature probe positioning actuator

Life of this patent

Abstract

Claims7