Method and system for controlling high-speed probe actuators
AssigneeInternational Business Machines Corporation
InventorsJames M. Hammond, James C. Mahlbacher, Kenneth G. Roessler, Michael Servedio, Li-Cheng R. Zai
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Abstract
A digital and analog controller for controlling a high-speed probe actuator is disclosed. This method and system provide the probe actuator system with improved damping ratio and reduced impact force, so the throughput of the tester is increased with fast settling actuator armature. With this method and system, the steady-state probe force is less sensitive to the servo system, test probe and variation in the probing distance d. An electronic circuit, which consists of analog operational amplifiers, monostable multivibrators, and D flip-flops, is presented for low-cost applications.
Claims6
A two-mode controller for a high-speed probe actuator used in testing electronic devices, comprising:
- means for positioning a test probe connected to said probe actuator to a first position short of actual contract to a device under test (DUT) solely in response to detection of a position of said test probe;
- and
- means for controlling the force of said probe actuator in placing said test probe on said DUT only after said positioning means completes its placement of said test probe at said first position.
Dependencies are inferred from the claim text.