Resolution-enhancement device for an optically-coupled image sensor for an electron microscope
AssigneeGatan, Inc.
InventorsPaul E. Mooney, Ondrej L. Krivanek
Life of this patent
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Abstract
An apparatus designed to be positioned in the projection chamber of an electron microscope to detect electron images and/or diffraction patterns from a sample and convert those electron images into light images is provided. The apparatus transfers light images to an imaging sensor for recording while enhancing resolution of the light images by absorbing substantially all laterally scattered light before it reaches the imaging sensor.
Claims20
An apparatus for improving the resolution of electron images comprising:
- an electron beam forming an electron image, a scintillator located in the path of said electron beam for converting said electron image into a light image, and an imaging sensor positioned to receive and record said light image, said apparatus further including a transfer optic associated with said scintillator for transferring said light image to said imaging sensor, and a light absorptive layer on said scintillator positioned to absorb reflected scattered light from said scintillator.
In an electron microscope having a projection chamber through which an electron beam forming an electron image and/or diffraction pattern traverses, an apparatus for improving the resolution of images produced by said electron microscope and positioned in said projection chamber to intercept said electron beam comprising:
- a scintillator located in the path of said electron beam for converting said electron image into a light image, and an imaging sensor positioned to receive and record said light image, said apparatus further including a transfer optic associated with said scintillator for transferring said light image to said imaging sensor, and a light absorptive layer on said scintillator positioned to absorb reflected scattered light from said scintillator.
An apparatus for improving the resolution of electron images comprising:
- an electron beam forming an electron image, a scintillator located in the path of said electron beam for converting said electron image into a light image, and an imaging sensor positioned to receive and record said light image, said apparatus further including a transfer optic associated with said scintillator for transferring said light image to said imaging sensor, a light absorptive layer on said scintillator, and a transparent conductive layer positioned between said scintillator and said transfer optic.
Dependencies are inferred from the claim text.