Apparatus for measuring a layer thickness using transverse waves of ultrasonic waves
AssigneeShinkokensa Service Kabushiki Kaisha
InventorsKohichi Ishikawa, Hitoshi Utsumi
Life of this patent
Estimating the term…
Abstract
An apparatus which measures a thickness of a layer using transverse waves of ultrasonic waves, and includes: a sensor unit having a probe for obliquely transmitting and receiving to and from the surface of a material to be measured having first and second layers with different acoustic impedances in a depth direction: an extractor for extracting, from a wave reception signal representing waves received by the probe, reflected waves from a boundary between the first and the second layers of the material; and a calculator for calculating a distance between the surface of the material and the boundary.
Claims19
An apparatus for measuring a thickness of a layer, comprising:
- a sensor unit including a probe for obliquely transmitting and receiving waves to and from the surface of a material to be measured having first and second layers with different grain sizes of grain particles in a depth direction;
- an extractor for extracting, from a wave reception signal representing waves received by the probe, signals of waves that are reflected by the grain particles of the material;
- and
- a calculator for calculating a distance between the surface of the material and a change in the grain sizes of the grain particles from said signals of waves.
An apparatus for measuring a thickness of a layer, comprising:
- a sensor unit including a probe for obliquely transmitting and receiving waves to and from the surface of a material to be measured having first and second layers with different grain sizes of grain particles in a depth direction;
- an extractor for extracting, from a wave reception signal representing waves received by the probe, signals of waves that are reflected by the grain particles of the material;
- and
- a calculator for calculating a distance between the surface of the material and a change in the grain sizes of the grain particles based on the signals of waves;
- and
- the sensor unit having a local water immersion construction including:
- a water reservoir having a water supply hole and an air-bubble discharge hole and having a surface which is in contact with the material and sealed by a transport sealing tape;
- and
- a holder of a transparent material having a fixing hole above and in communication with the water reservoir into which the probe is inserted to be fixed.
An apparatus for measuring a thickness of a layer, comprising:
- a sensor unit including a probe for obliquely transmitting and receiving waves to and from a surface of a material to be measured having first and second layers with different grain sizes of grain particles in a depth direction;
- an extractor for extracting, from a wave reception signal representing waves received by the probe, signals of waves that are reflected by the grain particles of the material;
- a calculator for calculating a distance between the surface of the material and a change in the grain sizes of the grain particles based on the signals of waves;
- the probe including a piezoelectric device;
- a wave reception line connecting the piezoelectric device and the extractor;
- and
- a matching coil in series with the wave reception line for matching an impedance of the piezoelectric device and an impedance of the extractor.
Dependencies are inferred from the claim text.