Chemically adsorbed film and method of manufacturing the same

A method of manufacturing a laminated film by a chemical adsorption process comprising the steps of:

• (A) contacting a substrate surface having active hydrogen groups with a non-aqueous solution containing a first chemical adsorption material (i) having reactive end groups including at least one chlorosilane group and (ii) a fluorocarbon chain for reacting the reactive end groups of said first chemical adsorption material with active hydrogen groups of the substrate surface so as to provide an adsorbed monomolecular precursor film;
• (B) removing unreacted chemical adsorption material remaining on the substrate surface by washing the substrate surface with a non-aqueous organic solution;
• (C) reacting chlorosilane group of the adsorbed monomolecular precursor film with water after the removal step (B);
• (D) drying the monomolecular film to form a first layer having active hydrogen groups on the surface thereof;
• (E) contacting said first layer with a non-aqueous solution containing a second chemical adsorption material having a fluorocarbon chain and at least one reactive end group for reacting the reactive end groups of said second chemical adsorption material with active hydrogen groups of the first layer and
• (F) repeating steps (B) to (D) to form a second layer having active hydrogen groups on the surface thereof.