Heating plate for heating an object placed on its surface and chemical treatment reactor equipped with said plate
AssigneeCommissariat a l'Energie Atomique
InventorsChantal Arena, Patrice Noel
Life of this patent
Estimating the term…
Abstract
A heating floor or plate for heating an object such as a substrate placed on its surface. A plate is provided whose surface temperature can be accurately adjusted so that the heat quantity supplied by two surface zones of the plate can be different even if the zones are small and contiguous. The plate has n zones, each having placed therein an electrically conducting heating element. n+1 sensors are used to measure the temperature of the plate, where n is an integer greater than 1. Data output from the sensors is processed and compared with at least one reference value and the result used to regulate the intensity of the current flowing in the elements based on the comparison.
Claims9
A heating plate for heating an object such as a substrate placed on its surface, said plate comprising:
- a bed plate made from a material having good thermal conductivity, said bed plate having n zones, where n is an integer greater than 1;
- a plurality of electrically conducting elements of length L.sub.n, with one of said elements being placed in each zone, each element being traversed by a current of intensity I.sub.n to heat the corresponding zone;
- n+1 sensors, each measuring the temperature of the surface of the bed plate and being positioned at ends of each zone;
- means for processing pairs of data supplied by the measuring sensors at either end of a corresponding zone to be heated;
- means for comparing a value supplied by the means for processing with at least one reference value;
- and
- means for regulating the intensity of the current flowing in each element, depending on the output of the comparison means, to adjust independently the heat quantity supplied by each zone in order to obtain a chosen temperature profile.
Dependencies are inferred from the claim text.