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US 5,635,053 AGranted
Method and apparatus for cleaning electronic parts
AssigneesNEC Corporation, Organo Corporation
InventorsHidemitsu Aoki, Masaharu Nakamori, Koji Yamanaka, Takashi Imaoka, Takashi Futatsuki, Yukinari Yamashita
Life of this patent
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Abstract
Electric parts including semiconductor substrates, glass substrates and the like are washed with various cleaning solutions. After the cleaning, said parts are cleaned with either anolyte or catholyte electrolytic ionized water (EIW) produced from deionized water.
Claims21
A method for cleaning electronic parts or the like, comprising:
- cleaning said electronic parts with a cleaning solution;
- and rinsing said cleaned electronic parts with anolyte or catholyte electrolytic ionized water (EIW) which is obtained by electrolyzing deionized water, wherein the EIW is used as a rinsing solution and includes less than 0.1% ions.
An apparatus for cleaning electronic parts or the like, said apparatus comprising:
- a deionized water producing apparatus comprising ion exchange apparatus, membrane separation apparatus and distillation apparatus configured to produce deionized water;
- a cleaning apparatus for cleaning electronic components with a cleaning solution and then rinsing the electronic components with a rinsing solution;
- and
- an electrolysis apparatus for producing anolyte and/or catholyte electrolytic ionized water (EIW) produced from said deionized water from said deionized water producing apparatus and supplying said anolyte and/or catholyte to the cleaning apparatus as said rinsing solution for said rinsing;
- wherein said electrolysis apparatus is disposed on a branching pipe for said deionized water, and wherein said rinsing solution includes less than 0.1% ions.
2 more elements
Dependencies are inferred from the claim text.