Confocal optical scanner
AssigneeYokogawa Electric Corporation
InventorsTakeo Tanaami, Kenta Mikuriya
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AssigneeYokogawa Electric Corporation
InventorsTakeo Tanaami, Kenta Mikuriya
Estimating the term…
A confocal optical scanner which realizes optical scanning without nonuniformity of brightness at the inside and outside periperies of the pinhole disk by arraying the pinholes along spiral tracks at the same pitch; which allows adjustment of decentering to be readily performed by disposing pinholes so that stripes do not occur even when decentering is large; which allows more incident light to be collected at the pinholes through a plurality of collector means by disposing the pinholes at focal points of the collector means; which improves luminous utilization efficacy by reducing the illumination area of light by adopting the collector means to focus outside of the aperture pupil; which prevents decrease of confocal resolution due to pinhole diameter by causing the light reflected from the sample to not enter a collector disk; and which reduces stray light from the pinhole disk by covering non-collector portions of the collector disk with a shading film.
In a confocal optical scanner comprising a pinhole plate defining a plurality of pinholes to scan light passing through said pinholes onto a sample, the improvement comprising
Dependencies are inferred from the claim text.