TFT substrate having scanning lines of metal films of columnar crystal grains

A liquid crystal display comprising:

• a first substrate provided with a plurality of scanning signal lines, a plurality of image signal lines arranged perpendicularly to the scanning signal lines, a plurality of thin-film transistors each formed at a respective cross-over point of the scanning signal lines and the image signal lines, and a plurality of pixel electrodes connected respectively to the thin-film transistors;
• a second substrate disposed opposite to the lower substrate and provided with a common electrode opposite to the pixel electrodes;
• and
• a liquid crystal layer sealed in a space formed between the first substrate and the second substrate;
• the scanning signal lines being formed on the first substrate so as to form gate electrodes of the corresponding thin-film transistors, respectively, the scanning signal lines being formed from a metal film of columnar crystal grains, wherein the metal film for forming the scanning signal lines is formed of a material containing aluminum as a matrix, and at least one of the transition elements of the element groups IVa and Va, and self-aligned oxide films being formed on the surfaces of the scanning signal lines.