Use of fresnel zone plates for material processing
AssigneeLitel Instruments
InventorsRobert O. Hunter, Jr., Adlai H. Smith, Clark C. Guest, Bruce B. McArthur
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AssigneeLitel Instruments
InventorsRobert O. Hunter, Jr., Adlai H. Smith, Clark C. Guest, Bruce B. McArthur
Estimating the term…
Optical machining of a workpiece with coherent light scanning a plate with a plurality of subaperture subapertures is disclosed. Each of the subapertures creates a working image which when scanned with a coherent wave front of the design frequency forms in three dimensional space the working image. The working image when registered to a workpiece effect processing of the workpiece, usually ablating an aperture such as a blind via of small dimension. Improved techniques of dimensioning and fabricating the subaperture, creating amplitude modulation with the phase plate, and finally controlling amplitude with optical features close to the limit of producible optical elements is disclosed. The apparatus for the process, the process and the plate for utilization in the process are set forth.
An optical plate, said plate having optical features forming a computer generated hologram including patterns of said optical features arrayed in regular fringes with local grating periods for producing from coherent light incident on said plate a working holographic image for processing materials, the improvement in said plate comprising a feature width variation for producing amplitude modulation comprising;
An optical plate for producing from a plane wave front of coherent light incident on said plate at subapertures within said plate working images for incidence to a workpiece for processing said workpiece with said working images, said plate including:
An optical plate for diffracting coherent light and modulating the phase and amplitude of said coherent light said plate comprising:
An apparatus including a scanning beam of coherent light of selected frequency and a plate for scan by said beam of coherent light comprising in combination;
A plate for scan by a beam of coherent light of a selected frequency comprising in combination;
A plate for scan by a beam of coherent light of a selected frequency according to claim 49 and further comprising in combination;
Dependencies are inferred from the claim text.