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US 5,633,465 AGranted
Pirani pressure sensor
OwnerJames Kaufmann, Mary G. Moss +1inventors
InventorsJames Kaufmann, Mary G. Moss, Terry L. Brewer
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Abstract
The invention is a method and apparatus for a pirani pressure sensor. The apparatus consists of a current supply and current receiving means affixed to a substrate. Bridging the current supply means and current receiving means is an electrically conductive polymer. The pirani pressure sensor may be made using conventional photolithographic techniques.
Claims3
A pirani pressure sensor comprising:
- (a) an electrically non-conductive substrate;
- (b) means for supplying an electric current affixed to the substrate;
- (c) means for receiving an electric current affixed to the substrate and electrically isolated from the supply means;
- and
- (d) an electrically conductive polymer sensor-heater bridge with a first end electrically connected to said supply means and a second end electrically connected to said receiving means, while avoiding contact with the substrate, said bridge is an ion-implanted polymer wherein the sensor can measure pressure between 10.sup.5 to 760 TORR.
2 more elements
Dependencies are inferred from the claim text.