Pinhole inspecting apparatus

A pinhole inspecting apparatus comprising:

• a pallet for dischargeably containing a closed container filled with a gas, the pallet having a suction hole;
• a gas leakage detecting unit adapted to be connected at an inspecting position to the suction hole for communication with the interior of the pallet, such that when a gas of the same kind as said gas in the closed container is present in the interior of the pallet, the gas leakage detecting unit generates an analog signal having a voltage corresponding to an amount of leakage of the gas from the closed container per unit time;
• an A/D converter for converting the analog signal into a current digital signal;
• and
• a second arithmetic means for calculating a difference between said current digital signal and a previous digital signal generated at a point in time traced back a predetermined period of time from a time of generation of said current digital signal;
• the second arithmetic means also for outputting an abnormality signal when it is determined that a difference between said difference between said current and said previous digital signals and a preliminarily inputted maximum value corresponding to the kind of gas in the closed container during the same time interval as said predetermined period of time fall out of an allowable range.

A pinhole inspecting apparatus comprising:

• a pallet for dischargeably containing a closed container filled with a gas, the pallet having a suction hole;
• a gas leakage detecting unit adapted to be connected at an inspecting position to the suction hole for communication with the interior of the pallet, such that when a gas of the same kind as said gas in the closed container is present in the interior of the pallet, the gas leakage detecting unit generates an analog signal having a voltage corresponding to an amount of leakage of the gas from the closed container per unit time;
• an A/D converter for converting the analog signal into a digital signal;
• a first arithmetic means for finding from the digital signal a slope of a regression line representing a relationship between a voltage corresponding to the magnitude of the signal and time, and calculating a difference between the value of the slope and a preliminarily inputted maximum slope value corresponding to the kind of gas in the closed container,
• the first arithmetic means also for outputting an abnormality signal when the difference falls out of an allowable range;
• and
• a second arithmetic means for calculating a difference between said current digital signal and a previous digital signal generated at a point in time traced back a predetermined period of time from a time of generation of said current digital signal;
• the second arithmetic means also for outputting an abnormality signal when it is determined that a difference between said difference between said current and said previous digital signals and a preliminarily inputted maximum value corresponding to the kind of gas in the closed container during the same time interval as said predetermined period of time fall out of an allowable range.