Method of forming wiring with gaps in bend to improve electromigration resistance
AssigneeUnited Microelectronics Corp.
InventorsWater Lur, Jiun Y. Wu
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Abstract
A new method of metallization using a new design of metal contact shape, contact/via profile, and metal lines having considerably reduced current density and improved electromigration of metal lines is achieved. Metal contacts are formed in a rectangular shape instead of a square shape with the wider side perpendicular to the current direction. Contact openings are made having concavo-concave profiles which can provide a wider conducting cross-sectional area than can conventional openings with a vertical profile near the contact bottom. Gaps are formed within wide and high current metal lines so that current density can be effectively lowered by utilizing the whole metal line uniformly.
Claims5
The method of forming gaps within metal lines in the fabrication of an integrated circuit wherein current density of said integrated circuit is lower than the current density of an integrated circuit having no gaps within said lines comprising:
- etching openings to form gaps within said metal lines where said metal lines bend wherein said gaps act to split the flow of said high current so that said flow is uniform through the width of said metal lines thereby reducing said current density at the critical region where said metal lines bend;
- and
- filling said gaps formed at the region where said metal lines bend with silicon dioxide wherein voids are formed within said silicon dioxide and wherein said voids act to reduce system stress.
The method of forming gaps metal lines in the fabrication of an integrated circuit comprising:
- etching openings to form gaps within said metal lines where said metal lines bend wherein said gaps act to split the flow of said current, thereby reducing said current density at the region where said metal lines bend;
- and
- filling said gaps formed at the region where said metal lines bend with an insulating material wherein voids are formed within said insulating material and wherein said voids act to reduce stress.
Dependencies are inferred from the claim text.