Method for achieving anode stripe delineation from an interlevel dielectric etch in a field emission device
AssigneeTexas Instruments Incorporated
InventorKenneth G. Vickers
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AssigneeTexas Instruments Incorporated
InventorKenneth G. Vickers
Estimating the term…
A method of fabricating a double level metal (DLM) anode plate for use in a field emission device comprises the steps of providing a transparent substrate 82 having an active region 58 and a bus region 62. Then providing electrically conductive regions 50 on the surface. The conductive regions 50 span the active region 58 and the bus region 62. Next, the surface is coated with an electrically insulating material 94 and then the electrically insulating material 94 is removed from selected portions of the bus region 62, the active region 58, and upper portions of the transparent substrate 82. A first bus 52 is provided for electrically connecting a first series of the conductive regions, a second bus 54 is provided for electrically connecting a second series of the conductive regions, and a third bus 56 is provided for electrically connecting a third series of the conductive regions. Luminescent material of a first color 88.sub.R is applied to the first series of conductive regions 50.sub.R, luminescent material of a second color 88.sub.G is applied to the second series of conductive regions 50.sub.G, and luminescent material of a third color 88.sub.B is applied to the third series of conductive regions 50.sub.B.
A method of fabricating an anode plate for use in a field emission device, said method comprising the steps of:
Dependencies are inferred from the claim text.