Ceramic susceptor with embedded metal electrode and eutectic connection
AssigneesApplied Materials, Inc., Cercom, Inc.
InventorsDavid W. Cheung, Mark A. Fodor, Christopher Lane, Harold H. Mortensen
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Abstract
A ceramic susceptor with an embedded metal electrode. The metal electrode has multiple apertures, and the ceramic material is cross-linked through the apertures. An electrical connection to the electrode protects the electrode from the environment in the processing chamber. The ceramic may be aluminum nitride, and the metal electrode may be a mesh of molybdenum wires. To form the electrical connection, the susceptor may be heated until an eutectic forms between a conductive connector and the metal electrode. Alternately, a brazing material may be placed between the metal layer and a conductive connector.
Claims5
A method of forming a susceptor comprising:
- isostatically pressing a high melting point conductive metal layer having a plurality of apertures therein between two green ceramic plates until cross-linking between said two ceramic plates occurs through said apertures to form a ceramic member in which said metal layer is embedded;
- forming an opening from a surface of said ceramic member to said metal layer;
- securing a conductive connector in said opening;
- and
- heating said susceptor until an eutectic forms between said conductive connector and said metal layer to form an electrical connection between said metal layer and said conductive connector.
A susceptor for supporting a substrate during a deposition process, comprising:
- a ceramic member;
- a high melting-point conductive metallic layer having a plurality of holes therein embedded in said ceramic member;
- an opening from a surface of said ceramic member to said metal layer;
- a conductive connector secured in said opening;
- and
- an eutectic layer disposed between said conductive connector and said metal layer to form an electrical connection between said metal layer and said conductive connector and to protect said metal layer from an environment in a chamber containing said susceptor.
Dependencies are inferred from the claim text.