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US 5,633,043 AGranted
Process for fabricating thin films
AssigneesResearch Development Corporation of Japan, Agency of Industrial Science and Technology
InventorsTakashi Hiraga, Tetsuo Moriya
Life of this patent
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Abstract
A process for producing thin films includes a step of dissolving one or two or more thin film materials into solutions or dispersions that are sprayed respective spray nozzles provided for each component onto a substrate in a high vacuum vessel. The components are deposited on the substrate and then are heated.
Claims16
A process for producing a film, said process comprising:
- forming a solution or dispersion of film material;
- spraying said solution or dispersion of said film material from a spray nozzle onto a substrate within a vacuum vessel while maintaining the interior of said vessel under a vacuum, said maintaining comprising evacuating said interior to a pressure not greater than 1.times.10.sup.-4 Pa;
- allowing the thus sprayed film material to deposit on said substrate;
- and
- after deposition of said film material on said substrate, heating the thus deposited film material.
2 more elements
Dependencies are inferred from the claim text.