US 5,631,722 A · Apparatus for exposing an adjustable area of a film

Abstract

Apparatus for exposing a selected area of a film, and comprising a holding assembly for holding a film, and a first support assembly connected to and supporting the holding assembly. The apparatus further comprises an exposure area control assembly located adjacent the holding assembly and forming an adjustable opening to expose a selected area of the film, and a second support assembly connected to and supporting the exposure area control assembly. Preferably, the first support assembly supports the film assembly for movement upward and downward and forward and rearward, and for pivotal movement about horizontal and vertical axes. Also, the second support assembly supports the exposure area control assembly for forward and rearward movement, and for pivotal movement about horizontal and vertical axes. In addition, in a preferred embodiment, the exposure area control assembly includes a frame and a multitude of slats supported by the frame, and these slats may be moved to vary the size, shape, and position of the adjustable opening formed by that control assembly. A preferred embodiment of the invention described herein in detail is very well suited for seamless topographic imaging large single crystal wafers, and in particular, for controlling the area of an x-ray film that is exposed when x-rays are scanned across a single crystal wafer to produce an x-ray topograph of the wafer.

Claims21

Dependent claims

Film exposure control apparatus comprising:

a holding assembly for holding a film;
a first support assembly connected to and supporting the holding assembly;
an exposure area control assembly located adjacent the holding assembly and forming an adjustable opening to expose a selected area of the film, the exposure area control assembly including
i) a frame forming a boundary for a given area, and
ii) a multitude of slats movably supported by the frame, wherein said slats form the adjustable opening, are movable to move said opening, and substantially completely cover said given area outside of said opening;
and
a second support assembly connected to and supporting the exposure area control assembly.

4 more elements

Film exposure control apparatus comprising:

a holding assembly for holding a film;
a first support assembly connected to and supporting the holding assembly;
an exposure area control assembly located adjacent the holding assembly and forming an adjustable opening to expose a selected area of the film;
and
a second support assembly connected to and supporting the exposure area control assembly, the second support assembly including (i) a support subassembly, and (ii) means connecting the exposure area control assembly to the support subassembly;
and wherein the connecting means has a locked position and an unlocked position;
in the locked position, the connecting means holds the exposure area control assembly in a generally fixed position relative to the support subassembly;
and
in the unlocked position, the connecting means supports the exposure area control assembly for forward and rearward movement along the support subassembly and for pivotal movement relative to the support subassembly.

6 more elements

Film exposure control apparatus comprising:

a holding assembly for holding a film;
a first support assembly connected to and supporting the holding assembly;
an exposure area control assembly located adjacent the holding assembly and forming an adjustable opening to expose a selected area of the film;
and
a second support assembly connected to and supporting the exposure area control assembly;
wherein the first support assembly includes (i) a support subassembly;
and (ii) means connecting the film assembly to the support subassembly;
the connecting means has a locked position and an unlocked position;
in the locked position, the connecting means holds the holding assembly in a generally fixed position relative to the support subassembly;
and
in the unlocked position, the connecting means supports the holding assembly for forward and rearward movement along the support subassembly and for pivotal movement relative to the support subassembly.

8 more elements

Dependencies are inferred from the claim text.

Apparatus for exposing an adjustable area of a film

Life of this patent

Apparatus for exposing an adjustable area of a film

Life of this patent

Abstract

Claims21