Semiconductor integrated circuit device

Abstract

There is disclosed a semiconductor integrated circuit device in which a semiconductor integrated circuit substrate provided with an electromagnetic coil from which lead wires are drawn out is movably arranged within a magnetic field. When a current is caused to flow in the magnetic coil through the conductors, a force in the direction of a magnetic field is exerted on the electromagnetic coil. Thus, this semiconductor integrated circuit device can operate as an actuator allowing the entirety of the substrate to be movable in either a positive or a negative direction the magnetic field. When the substrate is moved interlocking with a measurement object, an induced current flows in the electromagnetic coil. Accordingly, by measuring this current, it is possible to operate this device as a sensor capable of measuring changes in the physical quantity, etc. of the measurement object.

Dependencies are inferred from the claim text.