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US 5,631,463 AGranted
Displacement element, probe employing the element, and apparatus employing the probe
AssigneeCanon Kabushiki Kaisha
InventorsTakehiko Kawasaki, Keisuke Yamamoto, Yoshio Suzuki
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Abstract
A cantilever type displacement element includes a piezoelectric film and an electrode provided on each face of the film to displace the film by convence piezoelectric effect. The electrodes are formed from platinum or palladium. The displacement element constitutes a cantilver type probe having a tip on the free end of the element. The probe is used in a scanning tunneling microscope or an information processing apparatus.
Claims13
A cantilever type displacement element comprising:
- a piezoelectric film layer;
- and
- lower and upper electrode layers provided respectively on lower and upper faces of said piezoelectric layer to displace said film layer by converse piezoelectric effect, said electrode layers being formed of platinum or palladium, wherein
- said piezoelectric film layer is composed of either one of zinc oxide and aluminum nitride, and
- the crystal orientation in the platinum or palladium electrode layers is defined by the ratio of the intensity I.sub.(200) caused by a crystal plane (200) to the intensity I.sub.(111) of said lower electrode layer, measured by X-ray diffraction, in a range represented by the following relation:
- I.sub.(200) /I.sub.(111) <0.02.
3 more elements
A cantilever type probe, comprising:
- a piezoelectric film layer;
- lower and upper electrode layers provided respectively on lower and upper faces of said piezoelectric film layer to displace said film layer by converse piezoelectric effect, said electrode layers being formed of platinum or palladium and said piezoelectric film layer and electrode layers together forming a displacement element;
- a substrate supporting one end of said displacement element;
- and
- a tip provided on a free end of said displacement element, wherein
- said piezoelectric film layer is composed of either one of zinc oxide and aluminum nitride, and
- the crystal orientation in the platinum or palladium electrode layers is defined by the ratio of the intensity I.sub.(200) caused by a crystal plane (200) to the intensity I.sub.(111) of said lower electrode layer, measured by X-ray diffraction, in a range represented by the following relation:
- I.sub.(200) /I.sub.(111) <0.02.
5 more elements
A scanning tunneling microscope, comprising:
- a cantilever type probe having a piezoelectric film layer, lower and upper electrode layers provided respectively on lower and upper faces of said piezoelectric film layer to displace said film layer by converse piezoelectric effect, said electrode layers being formed of platinum or palladium and said piezoelectric film layer and electrode layers together forming a displacement element;
- a substrate supporting one end of said displacement element;
- a tip provided on a free end of said displacement element;
- a stage positioned opposite to said cantilever type probe for supporting a sample thereon;
- and
- said piezoelectric film layer is composed of either one of zinc oxde and aluminum nitride, and
- the crystal orientation in the platinum or palladium electrode layers is defined by the ratio of the intensity I.sub.(200) caused by a crystal plane (200) to the intensity I.sub.(111) of said lower electrode layer, measured by X-ray diffraction, in a range represented by the following relation:
- I.sub.(200) /I.sub.(111) <0.02.
5 more elements
An information processing apparatus comprising:
- a cantilever type probe having a piezoelectric film layer, lower and upper electrode layers provided respectively on lower and upper faces of said piezoelectric film layer to displace said film layer by converse piezoelectric effect, said electrode layers being formed of platinum or palladium and said piezoelectric film layer and electrode layers together forming a displacement element;
- a substrate supporting one end of said displacement element;
- a tip provided on a free end of said displacement element;
- a stage positioned opposite to said cantilever type probe for supporting a medium thereon;
- and
- control means for recording information on or reproducing information from the medium with said cantilever type probe, wherein
- said piezoelectric film layer is composed of either one of zinc oxide and aluminum nitride, and
- the crystal orientation in the platinum or palladium electrode layers is defined by the ratio of the intensity I.sub.(200) caused by a crystal plane (200) to the intensity I.sub.(111) of said lower electrode layer, measured by X-ray diffraction, in a range represented by the following relation:
- I.sub.(200) /I.sub.(111) <0.02.
6 more elements
Dependencies are inferred from the claim text.