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US 5,631,422 AGranted
Sensor comprising multilayer substrate
AssigneeRobert Bosch GmbH
InventorsPeter Sulzberger, Michael Offenberg, Bernhard Elsner, Markus Lutz
Life of this patent
Estimating the term…
Abstract
A sensor includes a first silicon layer, and a sensor element including at least one electrode structured from the first silicon layer. The sensor also includes at least one connecting element also structured from the first silicon layer. The connecting element has a doping less than the doping of the electrode. The sensor comprises at least one conductor track on the first silicon layer routed over the connecting element and coupled to the sensor element for supplying an external signal.
Claims10
A sensor comprising:
- a first silicon layer;
- a sensor element including at least one electrode structured from the first silicon layer, the electrode having a first doping;
- at least one connecting element structured from the first silicon layer, the connecting element having a second doping less than the first doping;
- and
- at least one conductor track on the first silicon layer, the conductor track being routed over the connecting element and being electrically coupled to the sensor element for supplying an external signal.
2 more elements
Dependencies are inferred from the claim text.