Piezoelectric acceleration transducer
AssigneeTemic Telefunken microelectronic GmbH
InventorsThomas Ohgke, Dieter Nagele, Gerald Brinks, Manfred Weinacht, Viktor Tiederle
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AssigneeTemic Telefunken microelectronic GmbH
InventorsThomas Ohgke, Dieter Nagele, Gerald Brinks, Manfred Weinacht, Viktor Tiederle
Estimating the term…
A piezoelectric acceleration transducer characterized by a flexible element formed of a piezoelectric material with two external electrodes, a support member having two plate-type supporting components between which the flexible member is arranged, and a carrier plate to which the support member is mechanically and electrically connected such that the principal axis of sensitivity of the flexible element lies in the same plane as the carrier plate. The supporting components may be formed of a nonconducting material with a electrically conductive coating on the side facing the flexible element and at a point of contact with the carrier base. Alternatively, the supporting components may be made from an electrically conductive material.
Piezoelectric acceleration transducer comprising an assembly consisting of a flexible element which is made of a piezoelectric material and is provided with two external electrodes, and which is secured to a support, the assembly being mounted on a carrier plate, wherein:
Piezoelectric acceleration transducer comprising an assembly consisting of a flexible element which is made of a piezoelectric material and is provided with two external electrodes, and which is secured to a support, the assembly being mounted on a carrier plate, wherein:
A piezoelectric acceleration transducer, comprising:
Dependencies are inferred from the claim text.