Electron-beam exposure system for reduced distortion of electron beam spot
AssigneesFujitsu Limited, Fujitsu VLSI Limited
InventorsTakamasa Satoh, Hiroshi Yasuda, Akio Yamada, Junichi Kai, Yoshihisa Oae, Keiji Yamada, Toru Oshima
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Abstract
An electron-beam exposure system includes an astigmatic compensation circuit that increases a voltage applied across a pair of electrodes forming an electrostatic sub-deflector and simultaneously decreases a voltage applied across another pair of electrodes forming the same electrostatic sub-deflector with a same magnitude as in the case of increasing the voltage, wherein the magnitude of the voltage change is changed in response to the deflection of the electron-beam caused by a main deflector.
Claims6
A method for exposing a pattern on an object by scanning a surface of the object with a focused electron-beam, the focused electron-beam having a desired size as incident on the scan surface of the object when aligned with a central optical axis substantially perpendicular to the surface and being subject to changes in size of the beam as the beam is deflected from the central optical axis for scanning corresponding portions of the surface of the object displaced from the central optical axis, the method comprising the steps of:
- dividing the surface of said object to be scanned by the focused electron-beam into a plurality of regions;
- detecting the corresponding, different sizes of said electron-beam when selectively deflected to each of said plurality of regions;
- storing data indicative of said detected, corresponding different sizes of said electron-beam, in association with said plurality of regions;
- and
- exposing said pattern on said object by scanning the surface thereof with the focused electron-beam, the scanning step further comprising:
- deflecting said focused electron-beam away from the central optical axis selectively to said plurality of regions for individually scanning each thereof, in a desired succession, and
- for each of the plurality of regions to which the focussed electron beam is deflected, reading out the corresponding stored data and correcting the size of the focused electron-beam to maintain a desired size thereof.
An exposure method employing a scanning electron beam which produces a scanning beam spot on a surface scanned by the beam and wherein the beam spot has a desired configuration when the beam is aligned with a central optical axis substantially perpendicular to the surface and which desired configuration is subject to change when the scanning beam is deflected away from the central optical axis for scanning corresponding portions of the surface displaced from the central optical axis, comprising the steps of:
- dividing the surface of the object to be scanned by the scanning beam spot into a plurality of regions;
- detecting the corresponding, different sizes of the beam spot as the beam is selectively deflected to each of said plurality of regions;
- storing data indicative of the detected, corresponding different sizes of the beam spot in association with the plurality of regions;
- and
- exposing the pattern on the object by scanning the surface thereof with the scanning beam, the scanning step further comprising:
- deflecting said focused electron-beam away from the central optical axis selectively to said plurality of regions for individually scanning each thereof, in a desired succession, and
- for each of the plurality of regions to which the focussed electron beam is deflected, reading out the corresponding stored data and correcting the size of the focused electron-beam to maintain a desired size thereof.
Dependencies are inferred from the claim text.